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METHOD AND APPARATUS FOR 3-DIMENSIONAL VISION AND INSPECTION OF BALL AND LIKE PROTRUSIONS OF ELECTRONIC COMPONENTS

  • US 20100328435A1
  • Filed: 03/29/2007
  • Published: 12/30/2010
  • Est. Priority Date: 06/21/2006
  • Status: Active Grant
First Claim
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1. A method for 3-dimensional vision inspection of objects, including microelectronic components, having protrusions as features to be inspected, wherein said protrusions having surfaces that are non-planar and/or curvatures, said method comprising the steps of:

  • (a) providing at least a pair of image capturing means with similar interior parameters arranged in a stereovision configuration;

    (b) calibrating each of said image capturing means to determine the interior and exterior parameters of said image capturing means;

    (c) forming a rectified coordinate system from the parameters of both image capturing means determined above with a relative pose of second image capturing means with respect to the first image capturing means;

    (d) capturing an image of an object to be inspected using each of said image-capturing means, wherein said object having a plurality of co-planar protrusions and said image captured is of at least one surface curvature of each of said protrusion;

    (e) rectifying coordinates of each image to produce a pair of rectified images in the said rectified coordinate system;

    (f) determining a conjugate point for the centre of each protrusion on each of the pair of images captured; and

    (g) measuring the distance of each protrusion from at least one of the image capturing means within the rectified coordinate system and the co-planarity of the protrusions.

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