BROAD BAND REFERENCING REFLECTOMETER
First Claim
1. A reflectometer, comprising:
- a light source that creates light including wavelengths below deep ultra-violet (DUV) wavelengths, the light being utilized to create at least one light beam in the reflectometer;
a region in which the light beam travels, the region sharing, at least at times, an environment with at least a portion of a process tool sample chamber so as to create a shared environment with the process tool sample chamber, the shared environment being sufficiently controlled so as to allow the transmission and measurement of light wavelengths below DUV wavelengths;
a detector configured to receive reflectance data from a sample in the process tool sample chamber, the detector detecting data for wavelengths at least below DUV wavelengths; and
at least one coupling mechanism interfacing the reflectometer with the process tool sample chamber and configured to permit the light from the light source to pass from the region into the sample chamber and to permit the light reflected from the sample to pass from the sample chamber to the first region so as to be received by the detector.
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Accused Products
Abstract
A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.
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Citations
20 Claims
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1. A reflectometer, comprising:
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a light source that creates light including wavelengths below deep ultra-violet (DUV) wavelengths, the light being utilized to create at least one light beam in the reflectometer; a region in which the light beam travels, the region sharing, at least at times, an environment with at least a portion of a process tool sample chamber so as to create a shared environment with the process tool sample chamber, the shared environment being sufficiently controlled so as to allow the transmission and measurement of light wavelengths below DUV wavelengths; a detector configured to receive reflectance data from a sample in the process tool sample chamber, the detector detecting data for wavelengths at least below DUV wavelengths; and at least one coupling mechanism interfacing the reflectometer with the process tool sample chamber and configured to permit the light from the light source to pass from the region into the sample chamber and to permit the light reflected from the sample to pass from the sample chamber to the first region so as to be received by the detector. - View Dependent Claims (2, 3, 4, 5)
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6. A reflectometer, comprising:
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a light source that creates light including wavelengths below deep ultra-violet (DUV) wavelengths, the light being utilized to create at least one light beam in the reflectometer; a region in which the light beam travels, the region being external to a process tool sample chamber and sharing, at least at times, an environment with at least a portion of the process tool sample chamber so as to create a shared environment with the process tool sample chamber, the shared environment being sufficiently controlled so as to allow the transmission and measurement of light wavelengths below DUV wavelengths; and a detector configured to receive reflectance data from a sample in the process tool sample chamber, the detector detecting data for wavelengths at least below DUV wavelengths. - View Dependent Claims (7, 8, 9, 10)
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11. An optical reflectometer, comprising:
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a light source providing a light beam including light below DUV wavelengths; a plurality of optical elements configured to direct the light beam to and from a sample area; a spectrometer that receives the light beam from the two-dimensional sample area, the spectrometer separating the light beam into multiple spatially separated wavelengths of light at an exit of the spectrometer; and an array detector that receives the multiple spatially separated wavelengths of light to simultaneously provide respective reflectance spectra below DUV wavelengths for multiple sites within the sample area. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method of analyzing reflectance characteristics of a sample, the method comprising:
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directing a light beam including light below DUV wavelengths onto an area of a sample; receiving at least a portion of the light beam reflected from the sample within an imaging spectrometer, which separates the reflected light beam into multiple spatially separated wavelengths of light at an exit plane of the spectrometer; and receiving the multiple spatially separated wavelengths of light with a two-dimensional array detector in order to simultaneously provide respective reflectance spectra below DUV wavelengths for multiple sites within the area of the sample. - View Dependent Claims (19, 20)
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Specification