MICROELECTRONIC SENSOR DEVICE FOR OPTICAL EXAMINATIONS ON A WETTED SURFACE
First Claim
1. A microelectronic sensor device for optical examinations in an investigation region (13) at the contact surface (12) of a carrier (10), comprisinga) a light source (20) for emitting an input light beam (L1, L1′
- ) towards the contact surface (12);
b) a light detector (30) for determining a characteristic parameter of an output light beam (L2, L2′
) that comes from the contact surface (12);
c) an evaluation unit (50) for detecting the wetting grade of the investigation region (13) based on the determined characteristic parameter.
5 Assignments
0 Petitions
Accused Products
Abstract
The application relates to a method and a microelectronic sensor device for making optical examinations in an investigation region (13) at the contact surface (12) of a carrier (10), wherein an input light beam (L1, L1′) is sent from a light source (20) towards the investigation region (13), and wherein an output light beam (L2, L2′) coming from the investigation region (13) is detected by a light detector (30). An evaluation unit (50) that is coupled to the light detector (30) is adapted to determine the wetting grade of the investigation region (13) based on a characteristic parameter of the output light beam (L2, L2′), e.g. its intensity. In a preferred embodiment, the evaluation unit (50) is adapted to determine a change in the light intensity caused by a liquid contacting the contact surface (12). The wetting grade may particularly be detected in a test region (14) that is located adjacent to the investigation region (13) and that has a higher roughness than the investigation region (13).
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Citations
16 Claims
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1. A microelectronic sensor device for optical examinations in an investigation region (13) at the contact surface (12) of a carrier (10), comprising
a) a light source (20) for emitting an input light beam (L1, L1′ - ) towards the contact surface (12);
b) a light detector (30) for determining a characteristic parameter of an output light beam (L2, L2′
) that comes from the contact surface (12);c) an evaluation unit (50) for detecting the wetting grade of the investigation region (13) based on the determined characteristic parameter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16)
- ) towards the contact surface (12);
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15. A method for making optical examinations in an investigation region (13) at the contact surface (12) of a carrier (10), comprising
a) emitting an input light beam (L1, L1′ - ) towards the contact surface (12);
b) determining a characteristic parameter of an output light beam (L2, L2′
) that comes from the contact surface (12);c) detecting the wetting grade of the investigation region (13) based on the determined characteristic parameter.
- ) towards the contact surface (12);
Specification