METHOD AND SYSTEM FOR PROVIDING A BARRIER FOR A MAGNETORESISTIVE STRUCTURE UTILIZING HEATING
First Claim
1. A method for providing magnetic recording transducer comprising:
- providing a pinned layer of a magnetic element;
providing a portion of a tunneling barrier layer for the magnetic element;
annealing the magnetic recording transducer after the portion of the tunneling barrier layer is provided at a temperature higher than room temperature;
providing a remaining portion of the tunneling barrier layer, the remaining portion being provided after the annealing of the magnetic recording transducer; and
providing a free layer for the magnetic element.
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Accused Products
Abstract
A method and system for providing a magnetic recording transducer is described. The method and system include providing a pinned layer for a magnetic element. In one aspect, a portion of a tunneling barrier layer for the magnetic element is provided. The magnetic recording transducer annealed is after the portion of the tunneling barrier layer is provided. The annealing is at a temperature higher than room temperature. A remaining portion of the tunneling barrier layer is provided after the annealing. In another aspect, the magnetic transducer is transferred to a high vacuum annealing apparatus before annealing the magnetic transducer. In this aspect, the magnetic transducer may be annealed before any portion of the tunneling barrier is provided or after at least a portion of the tunneling barrier is provided. The annealing is performed in the high vacuum annealing apparatus. A free layer for the magnetic element is also provided.
35 Citations
29 Claims
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1. A method for providing magnetic recording transducer comprising:
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providing a pinned layer of a magnetic element; providing a portion of a tunneling barrier layer for the magnetic element; annealing the magnetic recording transducer after the portion of the tunneling barrier layer is provided at a temperature higher than room temperature; providing a remaining portion of the tunneling barrier layer, the remaining portion being provided after the annealing of the magnetic recording transducer; and providing a free layer for the magnetic element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for providing magnetic recording transducer having an air-bearing surface (ABS) comprising:
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providing a pinned layer of a magnetic element; providing a portion of a tunneling barrier layer of the magnetic element, the tunneling barrier layer a total thickness upon completion, the portion of the tunneling barrier layer being at least twenty percent and less than one hundred percent of the total thickness; transferring magnetic transducer to a high vacuum annealing apparatus; annealing the magnetic recording transducer in the high vacuum annealing apparatus after the portion of the tunneling barrier layer is provided at a temperature of at least one hundred degrees centigrade and not more than two hundred degrees centigrade, the high vacuum annealing apparatus having a pressure of not more than 5×
10−
8 Torr during the anneal;providing a remaining portion of the tunneling barrier layer after the annealing of the magnetic recording transducer; and providing a free layer of the magnetic element.
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16. A method for providing magnetic recording transducer having an air-bearing surface (ABS) comprising:
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providing a pinned layer of a magnetic element; transferring magnetic transducer to a high vacuum annealing apparatus before annealing the magnetic transducer; annealing the magnetic recording transducer in the high vacuum annealing apparatus at a temperature higher than room temperature; providing a tunneling barrier layer of the magnetic element; and providing a free layer of the magnetic element. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. The method of 16 wherein the step of providing the tunneling barrier layer is after the step of annealing the magnetic transducer.
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27. The method of 16 wherein the step of providing the tunneling barrier layer is before the step of annealing the magnetic transducer.
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28. A magnetic recording transducer having an air-bearing surface (ABS) comprising:
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a magnetic element including a pinned layer, a tunneling barrier layer including MgO, and a free layer, the tunneling barrier layer having a crystal structure and an orientation, the tunneling barrier layer having a desired stoichiometry; and a hard bias structure adjacent to the magnetic element. - View Dependent Claims (29)
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Specification