X-RAY INSPECTING APPARATUS AND X-RAY INSPECTING METHOD

• US 20100329532A1
• Filed: 12/25/2008
• Published: 12/30/2010
• Est. Priority Date: 12/27/2007
• Status: Active Grant

• Current Assignee: Omron Corporation
• Original Assignee: Omron Corporation
• Inventors: Sasaki, Yasushi, Sugita, Shinji, Matsunami, Tsuyoshi, Kato, Noriyuki, Masuda, Masayuki
• Granted Patent: US 8,391,581 B2
• Time in Patent Office: Days
• US Class Current: 382/132
• CPC Class Codes: A61B 6/466 adapted to display 3D data
• CPC Class Codes: G01N 2223/3302 object and detector fixed
• CPC Class Codes: G01N 2223/419 computed tomograph
• CPC Class Codes: G01N 2223/6113 printed circuit board [PCB]
• CPC Class Codes: G01N 23/046 using tomography, e.g. computed tomography [CT]
• CPC Class Codes: G01T 1/2985 In depth localisation, e.g. using positron emitters; Tomographic imaging (longitudinal and transverse section imaging; apparatus for radiation diagnosis sequentially in different planes, steroscopic radiation diagnosis); using external radiation sources A61B6/02

Abstract

An X-ray inspecting apparatus capable of high-speed inspection of a prescribed inspection area of an object of inspection is provided. The X-ray inspecting apparatus includes: a scanning X-ray source for outputting X-ray; an X-ray detector driving unit on which a plurality of X-ray detectors are mounted, and capable of driving the plurality of X-ray detectors independently; and an image acquisition control mechanism controlling acquisition of image data by X-ray detector driving unit and X-ray detectors. A scanning X-ray source emits X-ray while moving the X-ray focal point of the X-ray source to each of X-ray emission originating positions set for each X-ray detector such that the X-ray passes through a prescribed inspection area of an object of inspection and enters each X-ray detector. Image pick-up by some of the X-ray detectors and movement of other X-ray detectors to an image pick-up position are executed in parallel and alternately. An image acquisition control unit acquires the image data picked-up by X-ray detectors, and a computing unit reconstructs an image in the inspection area based on the image data.

Claims

1. An X-ray inspecting apparatus, forming images of X-ray transmitted through an area of inspection of an object on a plurality of detection surfaces, for executing a process of reconstructing an image of the area of inspection, comprising:

a plurality of X-ray detectors smaller in number than the detection surfaces, for picking-up images on said plurality of detection surfaces;

a detector driving unit driving some of said plurality of X-ray detectors and remaining ones of said plurality of X-ray detectors independently from each other;

an X-ray output unit outputting X-ray such that the X-ray transmitted through said area of inspection enters said plurality of X-ray detectors moved to a plurality of image pick-up positions as said detection surfaces; and

a control unit controlling an operation of said X-ray inspecting apparatus;

wherein

said control unit includes

an image acquisition control unit controlling timing of exposure by each of said X-ray detectors and said detector driving unit,

an X-ray output control unit controlling said X-ray output unit, and

an image reconstruction processing unit for reconstructing image data of said area of inspection, based on data of intensity distribution of X-ray transmitted through said area of inspection, picked-up at said plurality of detection surfaces; and

said image acquisition control unit and said X-ray output control unit execute, in parallel,

a process of image pick-up by said some of said plurality of X-ray detectors at a first position among said plurality of image pick-up positions, and a process of moving said remaining ones of said plurality of X-ray detectors to a second position different from said first position among said plurality of image pick-up positions.

2. The X-ray inspecting apparatus according to claim 1, wherein

said image acquisition control unit and said X-ray output control unit cause,

for performing image pick-up of one area of inspection of said object, at a preset number of said image pick-up positions for said image data reconstruction separately in a number of times,

said some of said plurality of X-ray detectors to execute

a process of image pick-up at said first position and a process of moving to a next first position different from said first position after the image pick-up, and

cause said remaining ones of said plurality of X-ray detectors to execute

in parallel with said process of image pick-up at said first position by said some, a process of moving to said second position corresponding to next image pick-up different from said first position, from the next first position and from previous said second position, and in parallel with said process of moving said some to the next first position, a process of image pick-up at said second position.

3. The X-ray detector according to claim 1, wherein

said X-ray output control unit includes an originating point setting unit setting, for said plurality of detection surfaces, each originating position of emission of said X-ray such that said X-ray passes through said area of inspection and is incident on each of said detection surfaces;

and

said X-ray output unit moves an X-ray focal point position of X-ray source to each said originating position and generates said X-ray.

4. The X-ray inspecting apparatus according to claim 3, wherein

said X-ray output unit moves said X-ray focal point position by deflecting an electron beam to be incident on a target surface of a continuous surface of the X-ray source.

5. The X-ray inspecting apparatus according to claim 1,

wherein said detector driving unit includes a uniaxial driving unit for moving some of said plurality of X-ray detectors in a direction along a prescribed axis.

6. The X-ray inspecting apparatus according to claim 5, wherein

said uniaxial driving unit moves said plurality of X-ray detectors in a translational manner in a prescribed plane.

7. The X-ray inspecting apparatus according to claim 5, wherein

said detection surfaces of said plurality of X-ray detectors each have a rectangular shape;

and

said detector driving unit includes a rotating unit rotating said plurality of X-ray detectors such that one end of said detection surface of said plurality of X-ray detectors intersects a direction toward said X-ray output unit at each said image pick-up position.

8. The X-ray inspecting apparatus according to claim 5, wherein

the image reconstruction processing unit reconstructs image data of said area of inspection by an iterative method or an analytical method.

10. An X-ray inspecting apparatus according to claim 1,

wherein said X-ray output unit generates, to a plurality of X-ray detectors simultaneously in a state of image pick-up among the plurality of X-ray detectors arranged at said image pick-up positions, X-rays from a plurality of corresponding X-ray focal point positions,

said X-ray inspecting apparatus further comprising

a shielding member allowing passage of X-rays from said X-ray output unit, from a corresponding X-ray focal point position through said area of inspection to each of said detection surfaces of each of said X-ray detectors simultaneously in a state of image pick-up, and blocking an X-ray from a not-corresponding X-ray focal point position.

11. The X-ray inspecting apparatus according to claim 10, wherein

said X-ray output unit moves said X-ray focal point position by deflecting an electron beam to be incident on a target surface of a continuous surface of the X-ray source;

and

said X-ray output control unit controls said X-ray output unit such that said X-ray enters each of said plurality of X-ray detectors simultaneously in a state of image pick-up in a time-divisional manner.

13. The X-ray inspecting apparatus according to claim 1, wherein

said detector driving unit includes a two-axis driving unit moving said plurality of X-ray detectors independently along directions of prescribed two axes.

9. (canceled)

12. An X-ray inspecting apparatus, forming images of X-ray transmitted through an area of inspection of an object on a plurality of detection surfaces, for executing a process of reconstructing an image of the area of inspection, comprising:

a plurality of X-ray detectors smaller in number than the detection surfaces, for picking-up images on said plurality of detection surfaces;

a translational driving unit moving said plurality of X-ray detectors in a translational manner in a prescribed plane;

an X-ray output unit outputting X-ray such that the X-ray transmitted through said area of inspection enters said plurality of X-ray detectors moved to a plurality of image pick-up positions as said detection surfaces; and

a control unit controlling an operation of said X-ray inspecting apparatus;

wherein

said control unit includes

an image acquisition control unit controlling timing of exposure by each of said X-ray detectors and said translational driving unit,

an X-ray output control unit controlling said X-ray output unit, and

an image reconstruction processing unit for reconstructing image data of said area of inspection, based on data of intensity distribution of the X-ray transmitted through said area of inspection, picked-up at said plurality of detection surfaces.

14. A method for X-ray inspection, picking-up images of X-rays transmitted through an area of inspection of an object by X-ray detectors corresponding to a plurality of detection surfaces, for executing a process of reconstructing an image of said area of inspection, comprising the steps of:

moving each of said X-ray detectors independently to an image pick-up position to be said detection surface;

outputting X-ray such that the X-ray transmitted through said area of inspection enters said plurality of X-ray detectors moved to a plurality of said image pick-up positions respectively;

executing, in parallel, a process of image pick-up by said some of said plurality of X-ray detectors at a first position among said plurality of image pick-up positions, and a process of moving remaining ones, different from said some, of said plurality of X-ray detectors, to a second position different from said first position among said plurality of image pick-up positions; and

reconstructing image data of said area of inspection, based on data of intensity distribution of X-ray transmitted through said area of inspection, picked-up at said plurality of detection surfaces.

15. The method for X-ray inspection according to claim 14, wherein

said step of executing includes, for performing image pick-up of one area of inspection of said object, at a preset number of said image pick-up positions for said image data reconstruction separately in a number of times,

the step of causing said some of said plurality of X-ray detectors to execute a process of image pick-up at said first position and a process of moving to a next first position different from said first position after the image pick-up, and

in parallel with said process of image pick-up at said first position by said some, causing said remaining ones of said plurality of X-ray detectors to execute a process of moving to said second position corresponding to next image pick-up different from said first position, from the next first position and from previous said second position, and in parallel with said process of moving said some to the next first position, a process of image pick-up at said second position.

16. The method for X-ray inspection according to claim 14, wherein

said step of outputting X-ray includes the step of moving said X-ray focal point position by deflecting an electron beam to be incident on a target surface of a continuous surface of the X-ray source.