Pattern inspection method and apparatus

• US 20100329541A1
• Filed: 06/25/2010
• Published: 12/30/2010
• Est. Priority Date: 01/26/2005
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Nishijima, Tatsuji, Miyanaga, Akiharu, Oguni, Teppei
• Granted Patent: US 7,970,200 B2
• Time in Patent Office: Days
• US Class Current: 382/151
• CPC Class Codes: G01N 21/95692 Patterns showing hole parts, e.g. honeycomb filtering structures
• CPC Class Codes: G06T 2207/30148 Semiconductor; IC; Wafer
• CPC Class Codes: G06T 7/0004 Industrial image inspection
• CPC Class Codes: G06T 7/90 Determination of colour characteristics

Abstract

A color image of an inspection object is taken by an imaging means capable of taking a color image to obtain color information of an RGB color space. A gray-scale image of a color component of the RGB color space or another color space is generated, and the inspection object is detected by a pattern recognition technique. Alternatively, a binary image is generated from the generated gray-scale image, and the inspection object is detected by performing pattern recognition on the binary image. Color data of a pixel occupied by the detected inspection object is compared with color data of a non-defective inspection object which is previously prepared to judge whether or not the inspection object is defective. In addition, this judgment result is reflected in another manufacturing step through a network and product quality is improved.

Claims

1. A pattern inspection apparatus comprising:

means for magnifying and taking a color image including an inspection object over a substrate;

a generator of data of the taken color image;

a converter of first color information including three color coordinate components of an RGB color space obtained from the data of the color image into second color information including three color coordinate components of another color space; and

means for specifying a position of the inspection object and judging the inspection object based on the second color information.

5. A pattern inspection apparatus according to claim 1, wherein the data of the color image is generated using a digital camera attached to an optical microscope or a laser microscope.

2. A pattern inspection apparatus comprising:

means for magnifying and taking an image of an inspection object over a substrate;

means for generating data of the taken color image;

means for converting first color information including three color coordinate components of an RGB color space obtained from the data of the color image into second color information including three color coordinate components of another color space;

means for specifying a position of the inspection object based on a characteristic amount of an image obtained using the second color information; and

means for judging the inspection object by comparing the second color information with preset non-defective reference color information.

6. A pattern inspection apparatus according to claims 2, wherein the data of the color image is generated using a digital camera attached to an optical microscope or a laser microscope.

3. A pattern inspection apparatus comprising:

means for magnifying and taking an image of an inspection object over a substrate;

means for generating data of the taken color image;

means for converting first color information including three color coordinate components in an RGB color space obtained from the data of the color image into second color information including three color coordinate components in another color space;

means for taking a first color coordinate component which is previously selected and is suitable to specify a position of the inspection object from the second color information;

means for specifying the position of the inspection object based on a characteristic amount of an image obtained using the first color coordinate component;

means for taking a second color coordinate component which is previously selected and is suitable to judging the inspection object from the second color information; and

means for judging the inspection object by comparing a reference color coordinate component of preset non-defective reference color information with the second color coordinate component.

7. A pattern inspection apparatus according to claim 3, wherein the data of the color image is generated using a digital camera attached to an optical microscope or a laser microscope.

4. A pattern inspection apparatus comprising:

means for magnifying and taking an image of an inspection object over a substrate;

means for generating data of the taken color image;

means for converting first color information including three color coordinate components of an RGB color space obtained from the data of the color image into second color information including three color coordinate components of another color space;

means for taking a first color coordinate component which is previously selected and is suitable to specify a position of the inspection object from the second color information;

means for generating a gray-scale image in accordance with the first color coordinate component;

means for generating a binary image from the gray-scale image;

means for specifying the position of the inspection object based on a characteristic amount of the binary image;

means for taking a second color coordinate component which is previously selected and is suitable to judge the inspection object from the second color information; and

means for judging the inspection object by comparing a reference color coordinate component of preset non-defective reference color information with the second color coordinate component.

8. A pattern inspection apparatus according to claim 4, wherein the data of the color image is generated using a digital camera attached to an optical microscope or a laser microscope.