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CREATING EMISSION IMAGES OF INTEGRATED CIRCUITS

  • US 20100329586A1
  • Filed: 06/29/2009
  • Published: 12/30/2010
  • Est. Priority Date: 06/29/2009
  • Status: Active Grant
First Claim
Patent Images

1. A method of creating an image from a device, comprising:

  • acquiring first and second images from first and second areas of the device, said first and second images having overlapping portions;

    estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images;

    analyzing said overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images; and

    using said calculated precise shift amount to join the first and second images together to form a joined image.

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