CREATING EMISSION IMAGES OF INTEGRATED CIRCUITS
First Claim
1. A method of creating an image from a device, comprising:
- acquiring first and second images from first and second areas of the device, said first and second images having overlapping portions;
estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images;
analyzing said overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images; and
using said calculated precise shift amount to join the first and second images together to form a joined image.
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Accused Products
Abstract
A method, system and computer program product are disclosed for creating an image from a device. In one embodiment, the method comprises acquiring first and second images from the device, said first and second images having overlapping portions, and estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images. This method further comprises analyzing the overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images; and using said precise shift amount to join the first and second images together. In one embodiment, an optical system is used to acquire the images, a stage is used to move either the device or the optical system to acquire the first and second images, and the estimating includes using movement of the stage to estimate the overlapping areas.
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Citations
25 Claims
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1. A method of creating an image from a device, comprising:
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acquiring first and second images from first and second areas of the device, said first and second images having overlapping portions; estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images; analyzing said overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images; and using said calculated precise shift amount to join the first and second images together to form a joined image. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A system for acquiring and processing images from a device, comprising:
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an optical system for collecting light from the device; an imaging detector for measuring the intensity of the collected light; a translation stage for moving the optical system or the device to enable the optical system to take multiple images of different areas of the device; and a control unit for controlling movement of the translation stage, acquisition of the images, and processing of the images into a combined image; and
wherein;said multiple images include first and second images of first and second areas of the device, said first and second images having overlapping portions; and the control unit includes functionality for estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images, analyzing said overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images, and using said calculated precise shift amount to join the first and second images together to form a joined image. - View Dependent Claims (12, 13, 14, 15)
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16. An article of manufacture comprising:
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at least one tangible computer readable medium having computer readable program code logic to execute machine instructions in one or more processing units for acquiring and processing images of a device in an image acquisition and processing system including an optical system for collecting light from the device, and a translation stage to move the optical system or the device to enable the optical system to take multiple images of different areas of the device, said multiple images including first and second images of first and second areas of the device, said first and second images having overlapping portions, the computer readable program code logic, when executing, performing the following; controlling movement of the translation stage, acquisition of the images, and processing of the images into a combined image, including estimating said overlapping portions to obtain an approximate shift amount to align approximately said first and second images, analyzing said overlapping portions, using a defined cross-correlation algorithm, to calculate a precise shift amount to align the first and second images, and using said calculated precise shift amount to join the first and second images together to form a joined image. - View Dependent Claims (17, 18, 19, 20)
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21. A method of creating an emission image of an area of an integrated circuit that is larger than a field of view of an optical system used for acquiring the image, the method comprising:
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acquiring first and second initial emission images of corresponding first and second areas of an integrated circuit, by using an optical system, wherein said first and second initial images have overlapping portions; determining an approximate shift amount to obtain an approximate alignment of said first and second initial images; processing at least parts of the first and second initial images, using a defined correlation algorithm, to determine a precise shift amount to align the first and second initial emission images; and forming a composite image by using said precise shift amount to join together the first and second initial images, wherein the optical system has a field of view, and said composite image corresponds to an area of the integrated circuit that is larger than the field of view of the optical system. - View Dependent Claims (22, 23, 24, 25)
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Specification