METHOD AND APPARATUS FOR INSPECTING SCRIBES IN SOLAR MODULES

• US 20100330711A1
• Filed: 06/26/2009
• Published: 12/30/2010
• Est. Priority Date: 06/26/2009
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Schlezinger, Asaf
• Application Number:
  US12/492,989
• Publication Number:
  US 20100330711A1
• Time in Patent Office: Days
• US Class Current: 438/7
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: H01L 31/0463 characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
• CPC Class Codes: H02S 50/00 Monitoring or testing of PV systems, e.g. load balancing or fault identification
• CPC Class Codes: H02S 50/10 Testing of PV devices, e.g. of PV modules or single PV cells testing of semiconductor devices during manufacturing H01L22/00
• CPC Class Codes: H02S 50/15 using optical means, e.g. using electroluminescence
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

Embodiments of the present invention generally relate to a method and apparatus for inspecting and analyzing the spacing of isolation trenches scribed in a solar module during the fabrication process. In one embodiment, images of the scribed trenches are captured and analyzed at various points in the fabrication process. The results may then be used either manually or in an automated fashion to diagnose, alter, and tune upstream processes for improved scribe spacing on subsequently processed solar modules.

Claims

1. An apparatus for inspecting scribed trenches in a partially formed solar module, comprising:

a first illumination source positioned to illuminate a back surface of the partially formed solar module;

an inspection device positioned to capture an image of a region of the back surface of the partially formed solar module; and

a system controller in communication with the first illumination source and the inspection device, wherein the system controller is configured to receive and analyze the image received from the inspection device.

2. The apparatus of claim 1, wherein the first illumination source is positioned to emit light at an angle between about 75°

and about 89°

with respect to the back surface, and wherein the inspection device is positioned at an angle between about 75° and

about 89°

with respect to the back surface.

3. The apparatus of claim 1, further comprising a beam splitter, wherein the first illumination source is positioned to emit light substantially parallel to the back surface, and wherein the inspection device is positioned substantially perpendicular to the back surface.

4. The apparatus of claim 1, further comprising a second illumination source positioned to illuminate a front surface of the partially formed solar module, wherein the system controller is further in communication with the second illumination source.

5. The apparatus of claim 4, wherein the second illumination source is configured to illuminate the front surface of the partially formed solar module with light having wavelengths only in the blue spectrum, and wherein the first illumination source is configured to illuminate the back surface of the partially formed solar module with light having wavelengths only in the red spectrum.

6. The apparatus of claim 4, wherein the second illumination source is positioned to emit light at an angle between about 75°

and about 90°

with respect to the front surface, wherein the first illumination source is positioned to emit light at an angle between about 75° and

about 89°

with respect to the back surface, and wherein the inspection device is positioned at an angle between about 75° and

about 89°

with respect to the back surface.

7. The apparatus of claim 4, further comprising a beam splitter, wherein the second illumination source is positioned to emit light substantially perpendicular to the front surface, wherein the first illumination source is positioned to emit light substantially parallel to the back surface, and wherein the inspection device is positioned substantially perpendicular to the back surface.

8. A method of inspecting scribed trenches in a partially formed solar module, comprising:

receiving the partially formed solar module having at least a front contact layer disposed thereon with one or more first trenches scribed in the front contact layer and a photovoltaic layer disposed over the front contact layer having one or more second trenches scribed in the photovoltaic layer;

illuminating a back surface of the partially formed solar module; and

optically inspecting a region of the partially formed solar module having at least a portion of the one or more first trenches and at least a portion of the one or more second trenches disposed therein while illuminating the back surface of the partially formed solar module, wherein optically inspecting comprises capturing an image of the region and analyzing a position or orientation of the portion of the one or more first trenches relative to the portion of the one or more second trenches.

9. The method of claim 8, wherein illuminating the back surface comprises emitting light at an angle from between about 75°

and about 89°

with respect to the back surface, and wherein optically inspecting comprises capturing an image of the region with an inspection device positioned at an angle from between about 75° and

about 89°

with respect to the back surface.

10. The method of claim 9, further comprising illuminating a front surface of the partially formed solar module, wherein illuminating the front surface comprises emitting light at an angle from between about 75°

and about 90°

with respect to the front surface, and wherein the optically inspecting is performed while illuminating the front and back surfaces.

11. The method of claim 8, wherein illuminating the back surface comprises emitting light substantially parallel to the back surface, and wherein optically inspecting comprises capturing an image of the region with an inspection device positioned substantially perpendicular to the back surface.

12. The method of claim 11, further comprising illuminating a front surface of the partially formed solar module, wherein illuminating the front surface comprises emitting light substantially perpendicular to the front surface, and wherein the optically inspecting is performed while illuminating the front and back surfaces.

13. A system for fabricating solar modules, comprising:

a first scribing module configured to scribe one or more first trenches in a front contact layer of a solar cell substrate;

one or more cluster tools having at least one chamber configured to deposit at least one photovoltaic layer over the front contact layer;

a second scribing module configured to scribe one or more second trenches in the at least one photovoltaic layer;

a first optical inspection module having a first illumination source and an inspection device configured to capture an image of at least a portion of the first and second trenches; and

a system controller in communication with at least the first scribing module, the second scribing module and the optical inspection module, wherein the system controller is configured to receive and analyze the image of the portion of the first and second trenches, and wherein the system controller is configured to alter parameters of at least one of the first and second scribing modules in response to the analyzed image.

14. The system of claim 13, wherein the first illumination source of the first optical inspection module is positioned to illuminate a back surface of the solar cell substrate, and wherein the inspection device is positioned to capture an image from the back surface of the solar cell substrate.

15. The system of claim 14, wherein the first illumination source is positioned to emit light at an angle between about 75°

and about 89°

with respect to the back surface, and wherein the inspection device is positioned at an angle between about 75° and

about 89°

with respect to the back surface.

16. The system of claim 14, wherein the first inspection module further comprises a beam splitter, wherein the first illumination source is positioned to emit light substantially parallel to the back surface, and wherein the inspection device is positioned substantially perpendicular to the back surface.

17. The system of claim 14, further comprising:

a deposition module configured to deposit a back contact layer over the at least one photovoltaic layer;

a third scribing module configured to scribe one or more third trenches in the back contact layer; and

a second optical inspection module having a first illumination source and an inspection device configured to capture an image of a portion of the first, second, and third trenches, wherein the system controller is further in communication with the deposition module, the third scribing module, and the second optical inspection module, and wherein the system controller is further configured to receive and analyze the image of the portion of the first, second, and third trenches, and wherein the system controller is further configured to alter parameters of at least one of the first, second, and third scribing modules in response to the analyzed images.

18. The system of claim 17, wherein the first optical inspection module further comprises a second illumination source positioned to illuminate a front surface of the substrate, and wherein the second optical inspection module further comprises a second illumination source positioned to illuminate the front surface of the substrate.

19. The system of claim 18, wherein each of the first illumination sources is positioned to emit light at an angle between about 75°

and about 90°

with respect to the front surface, wherein each of the second illumination sources is positioned to emit light at an angle between about 75° and

about 89°

with respect to the back surface, and wherein each of the inspection device is positioned at an angle between about 75° and

about 89°

with respect to the back surface.

20. The system of claim 16, wherein each of the first and second inspection modules further comprises a beam splitter, wherein each of the first illumination sources is positioned to emit light substantially perpendicular to the front surface, wherein each of the second illumination sources is positioned to emit light substantially parallel to the back surface, and wherein each of the inspection devices is positioned substantially perpendicular to the back surface.

21. A process for fabricating solar modules, comprising:

receiving a solar cell substrate having at least a front contact layer disposed thereon;

scribing one or more first trenches in the front contact layer via a first scribing module;

depositing a photovoltaic layer over the front contact layer;

scribing one or more second trenches in the photovoltaic layer via a second scribing module;

capturing an image of at least a portion of the first and second trenches while illuminating a back surface of the solar cell substrate;

analyzing the captured image of the at least a portion of the first and second trenches by analyzing a position or orientation of at least a portion of the one or more first trenches with respect to at least a portion of the one or more second trenches; and

altering one or more process parameters of at least one of the first and second scribing modules based on the analyzed image of the at least a portion of the first and second trenches.

22. The process of claim 21, further comprising:

depositing a back contact layer over the photovoltaic layer;

scribing one or more third trenches in the back contact layer via a third scribing module;

capturing an image of at least a portion of the first, second, and third trenches while illuminating the back surface of the solar cell substrate;

analyzing the captured image of the at least a portion of the first, second, and third trenches by analyzing a position or orientation of at least a portion of the one or more second trenches with respect to at least a portion of the one or more third trenches; and

altering one or more process parameters of at least one of the first, second, and third scribing modules based on the analyzed image of the at least a portion of the first, second, and third trenches.

23. The process of claim 22, wherein the capturing an image of at least a portion of the first and second trenches is performed while further illuminating a front surface of the solar cell substrate, and wherein the capturing an image of at least a portion of the first, second, and third trenches is performed while further illuminating a front surface of the solar cell substrate.

24. The process of claim 23, wherein illuminating the front surface comprises emitting light at an angle from between about 75°

and about 90°

with respect to the front surface, wherein illuminating the back surface comprises emitting light at a angle from between about 75° and

about 89°

with respect to the back surface, and wherein the capturing the image comprises capturing an image with an inspection device positioned at an angle from between about 75° and

about 89°

with respect to the back surface.

25. The process of claim 23, wherein illuminating the front surface comprises emitting light substantially perpendicular to the front surface, wherein illuminating the back surface comprises emitting light substantially parallel to the back surface, and wherein the capturing the image comprises capturing an image with an inspection device positioned substantially perpendicular to the back surface.