ARRANGEMENT FOR IDENTIFYING UNCONTROLLED EVENTS AT THE PROCESS MODULE LEVEL AND METHODS THEREOF
First Claim
1. A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system, comprising:
- a process module controller;
a plurality of sensors, wherein each sensor of said plurality of sensors communicates with said process module controller to collect sensed data about one or more process parameters; and
a process-module-level analysis server, wherein said process-module-level analysis server communicates directly with said plurality of sensors and said process module controller, wherein said process-module-level analysis server is configured forreceiving data, wherein said data include at least one of said sensed data from said plurality of sensors and process module and chamber data from said process module controller,analyzing said data, andsending interdiction data directly to said process module controller when a problem is identified during said substrate processing.
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Abstract
A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system is provided. The architecture includes a process module controller. The architecture also includes a plurality of sensors, wherein each sensor of the plurality of sensors communicates with the process module controller to collect sensed data about one or more process parameters. The architecture further includes a process-module-level analysis server, wherein the process-module-level analysis server communicates directly with the plurality of sensors and the process module controller. The process-module-level analysis server is configured for receiving data, wherein the data include at least one of the sensed data from the plurality of sensors and process module and chamber data from the process module controller. The process-module-level analysis server is also configured for analyzing the data and sending interdiction data directly to the process module controller when a problem is identified during the substrate processing.
123 Citations
20 Claims
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1. A process-level troubleshooting architecture (PLTA) configured to facilitate substrate processing in a plasma processing system, comprising:
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a process module controller; a plurality of sensors, wherein each sensor of said plurality of sensors communicates with said process module controller to collect sensed data about one or more process parameters; and a process-module-level analysis server, wherein said process-module-level analysis server communicates directly with said plurality of sensors and said process module controller, wherein said process-module-level analysis server is configured for receiving data, wherein said data include at least one of said sensed data from said plurality of sensors and process module and chamber data from said process module controller, analyzing said data, and sending interdiction data directly to said process module controller when a problem is identified during said substrate processing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An arrangement configured to perform evaluation during substrate processing in a plasma processing system, wherein said arrangement is coupled directly to a process module controller and a plurality of sensors, comprising:
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a plurality of processors for processing data, wherein said data includes at least one of sensed data collected by said plurality of sensors and process module and chamber data collected by said process module controller, wherein said processing includes at least one of receiving said data, analyzing said data, performing data correlation, and sending interdiction data to said process module controller when a problem is identified; a shared memory backbone, wherein said shared memory backbone is accessed by said plurality of processors; a network interface, wherein said network interface is configured at least for receiving said data; and a direct digital output line, wherein said direct digital output line is a communication path between said plurality of processors and said process module controller. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification