METHODS AND APPARATUS FOR PREDICTIVE PREVENTIVE MAINTENANCE OF PROCESSING CHAMBERS
First Claim
1. A method for assessing health status of a processing chamber, comprising:
- executing a recipe;
receiving processing data from a set of sensors during execution of said recipe;
analyzing said processing data utilizing a set of multi-variate predictive models;
generating a set of component wear data values;
comparing said set of component wear data values against a set of useful life threshold ranges; and
generating a warning if said set of component wear data values is outside of said set of useful life threshold ranges.
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Abstract
A method for assessing health status of a processing chamber is provided. The method includes executing a recipe. The method also includes receiving processing data from a set of sensors during execution of the recipe. The method further includes analyzing the processing data utilizing a set of multi-variate predictive models. The method yet also includes generating a set of component wear data values. The method yet further includes comparing the set of component wear data values against a set of useful life threshold ranges. The method moreover includes generating a warning if the set of component wear data values is outside of the set of useful life threshold ranges.
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Citations
20 Claims
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1. A method for assessing health status of a processing chamber, comprising:
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executing a recipe; receiving processing data from a set of sensors during execution of said recipe; analyzing said processing data utilizing a set of multi-variate predictive models; generating a set of component wear data values; comparing said set of component wear data values against a set of useful life threshold ranges; and generating a warning if said set of component wear data values is outside of said set of useful life threshold ranges. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured for assessing health status of a processing chamber, comprising:
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code for executing a recipe; code for receiving processing data from a set of sensors during execution of said recipe; code for analyzing said processing data utilizing a set of multi-variate predictive models; code for generating a set of component wear data values; code for comparing said set of component wear data values against a set of useful life threshold ranges; and code for generating a warning if said set of component wear data values is outside of said set of useful life threshold ranges. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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Specification