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METHODS AND APPARATUS FOR PREDICTIVE PREVENTIVE MAINTENANCE OF PROCESSING CHAMBERS

  • US 20100332201A1
  • Filed: 06/29/2010
  • Published: 12/30/2010
  • Est. Priority Date: 06/30/2009
  • Status: Active Grant
First Claim
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1. A method for assessing health status of a processing chamber, comprising:

  • executing a recipe;

    receiving processing data from a set of sensors during execution of said recipe;

    analyzing said processing data utilizing a set of multi-variate predictive models;

    generating a set of component wear data values;

    comparing said set of component wear data values against a set of useful life threshold ranges; and

    generating a warning if said set of component wear data values is outside of said set of useful life threshold ranges.

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