DEVICE AND METHOD FOR INTRODUCING GAS FOR ANALYSIS DEVICE
First Claim
1. A device for introducing a gas for an analysis device, which includes:
- a gas synthesis unit that synthesizes a plurality of types of gases in a mixing chamber;
a pressure adjusting unit that introduces the gas synthesized in the gas synthesis unit for pressure reduction;
a gas switching unit including a gas switching valve that performs switching so as to introduce the depressurized gas from the pressure adjusting unit to the gas analysis device, and a gas analysis device that analyses a component of the synthesized gas,wherein the gas synthesis unit includes a plurality of gas introducing paths leading from a plurality of gas sources to the mixing chamber via a pressure valve, a path for exhaustion from the mixing chamber to exterior via an open/close valve, and a path for introduction from the mixing chamber to the pressure adjusting unit via a flow-adjusting valve,wherein the pressure adjusting unit includes an introducing chamber that introduces gas from the gas synthesis unit, a path provided with a pump that reduces the pressure of the gas introduced in the introducing chamber to a pressure ranging from 0.1 Pa to 0.1 MPa, and a path leading from the introducing chamber to the gas switching unit, andwherein the gas switching unit includes a path guiding the gas from the pressure adjusting unit to the analysis device via the gas switching valve, and a gas switching valve that performs switching so as to introduce the depressurized gas to the inside of the gas analysis device maintained at 10−
2 Pa or less.
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Accused Products
Abstract
Gas is supplied from positive pressure (105 Pa or more) to an analysis device of high vacuum (10−2 Pa or less) precisely and stably, while keeping conditions constant and replicating the conditions, and performing switching to a desired gas within a short time. According to a gas introducing device and a method, a plurality of types of gases are synthesized in a mixing chamber, the synthesized gas is introduced and the pressure of the gas is reduced by a pressure reducing pump to a pressure ranging from 0.1 Pa to 0.1 MPa, and the depressurized gas is introduced to a gas analysis device through a switching operation using a gas switching valve.
9 Citations
5 Claims
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1. A device for introducing a gas for an analysis device, which includes:
- a gas synthesis unit that synthesizes a plurality of types of gases in a mixing chamber;
a pressure adjusting unit that introduces the gas synthesized in the gas synthesis unit for pressure reduction;
a gas switching unit including a gas switching valve that performs switching so as to introduce the depressurized gas from the pressure adjusting unit to the gas analysis device, and a gas analysis device that analyses a component of the synthesized gas,wherein the gas synthesis unit includes a plurality of gas introducing paths leading from a plurality of gas sources to the mixing chamber via a pressure valve, a path for exhaustion from the mixing chamber to exterior via an open/close valve, and a path for introduction from the mixing chamber to the pressure adjusting unit via a flow-adjusting valve, wherein the pressure adjusting unit includes an introducing chamber that introduces gas from the gas synthesis unit, a path provided with a pump that reduces the pressure of the gas introduced in the introducing chamber to a pressure ranging from 0.1 Pa to 0.1 MPa, and a path leading from the introducing chamber to the gas switching unit, and wherein the gas switching unit includes a path guiding the gas from the pressure adjusting unit to the analysis device via the gas switching valve, and a gas switching valve that performs switching so as to introduce the depressurized gas to the inside of the gas analysis device maintained at 10−
2 Pa or less. - View Dependent Claims (2, 3, 4)
- a gas synthesis unit that synthesizes a plurality of types of gases in a mixing chamber;
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5. A method for introducing a gas for an analysis device, comprising the steps of:
- mixing a plurality of types of gasses in a mixing chamber of a gas synthesis unit;
adjusting the flow rate of the mixed gas so as to introduce the mixed gas to a pressure adjusting unit;
reducing the pressure of the introduced gas in the pressure adjusting unit with a pump to a preset pressure ranging from 0.1 Pa to 0.1 MPa; and
introducing the gas depressurized to the above pressure to the inside of the analysis device maintained at 10−
2 Pa or less via a gas switching valve of a gas switching unit.
- mixing a plurality of types of gasses in a mixing chamber of a gas synthesis unit;
Specification