FORCE DETECTION DEVICE
First Claim
1. A force detection device which detects a force applied in a predetermined direction in an XYZ three-dimensional coordinate system, comprising:
- an upper substrate having a substrate surface parallel to an XY plane;
a lower substrate having a substrate surface parallel to the XY plane and disposed below the upper substrate;
a first columnar member having an upper end directly or indirectly joined to a lower surface of the upper substrate, and a lower end directly or indirectly joined to an upper surface of the lower substrate;
a second columnar member having an upper end directly or indirectly joined to the lower surface of the upper substrate, and a lower end directly or indirectly joined to the upper surface of the lower substrate; and
a detector which outputs an electric signal showing an applied force based on displacements of the first columnar member and the second columnar member, whereina vicinity of a joined portion to which the lower end of the first columnar member is joined with the lower substrate constitutes a first lower film portion with flexibility;
a vicinity of a joined portion to which the lower end of the second columnar member is joined with the lower substrate constitutes a second lower film portion with flexibility;
a projection image obtained by orthogonally projecting a central axis of the first columnar member onto an XZ plane is inclined in a first direction with respect to a Z-axis, and a projection image obtained by orthogonally projecting a central axis of the second columnar member onto the XZ plane is inclined in a second direction opposite to the first direction with respect to the Z-axis; and
the detector includes a first sensor which detects a displacement in the Z-axis direction of the first lower film portion and a second sensor which detects a displacement in the Z-axis direction of the second lower film portion, and outputs an electric signal showing a difference between a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fx in an X-axis direction applied to the upper substrate in a state where the lower substrate is fixed.
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Accused Products
Abstract
Between an upper substrate 10 and a lower substrate 20 parallel to the XY plane, a first columnar member P1 and a second columnar member P2 are disposed. The upper end of each columnar member P1 or P2 is connected to the upper substrate 10 via an upper film portion 11 or 12, and the lower end is connected to the lower substrate 20 via a conductive lower film portion 21 or 22. The columnar members P1 and P2 are inclined mutually opposite with respect to vertical reference axes R1 and R2. When a rightward force +Fx is applied to the upper substrate 10 and the upper substrate 10 slides rightward, the columnar member P1 incline in a laying-down direction and the lower film portion 21 is deformed upward, and the columnar member P2 inclines in a rising direction and the lower film portion 22 is deformed downward. Based on a difference in capacitance value between a capacitance element consisting of the lower film portion 21 and an electrode E5 and a capacitance element consisting of the lower film portion 22 and an electrode E6, the force Fx in the X-axis direction is detected. By summing the capacitance values, a force Fz in the Z-axis direction can also be detected.
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Citations
63 Claims
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1. A force detection device which detects a force applied in a predetermined direction in an XYZ three-dimensional coordinate system, comprising:
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an upper substrate having a substrate surface parallel to an XY plane; a lower substrate having a substrate surface parallel to the XY plane and disposed below the upper substrate; a first columnar member having an upper end directly or indirectly joined to a lower surface of the upper substrate, and a lower end directly or indirectly joined to an upper surface of the lower substrate; a second columnar member having an upper end directly or indirectly joined to the lower surface of the upper substrate, and a lower end directly or indirectly joined to the upper surface of the lower substrate; and a detector which outputs an electric signal showing an applied force based on displacements of the first columnar member and the second columnar member, wherein a vicinity of a joined portion to which the lower end of the first columnar member is joined with the lower substrate constitutes a first lower film portion with flexibility; a vicinity of a joined portion to which the lower end of the second columnar member is joined with the lower substrate constitutes a second lower film portion with flexibility; a projection image obtained by orthogonally projecting a central axis of the first columnar member onto an XZ plane is inclined in a first direction with respect to a Z-axis, and a projection image obtained by orthogonally projecting a central axis of the second columnar member onto the XZ plane is inclined in a second direction opposite to the first direction with respect to the Z-axis; and the detector includes a first sensor which detects a displacement in the Z-axis direction of the first lower film portion and a second sensor which detects a displacement in the Z-axis direction of the second lower film portion, and outputs an electric signal showing a difference between a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fx in an X-axis direction applied to the upper substrate in a state where the lower substrate is fixed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 61, 62, 63)
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14. A force detection device which detects a force applied in a predetermined direction in an XYZ three-dimensional coordinate system, comprising:
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a first columnar member and a second columnar member disposed so as to incline in predetermined directions with respect to a Z-axis defined in an up-down direction; an upper structural body disposed above the first columnar member and the second columnar member; a lower structural body disposed below the first columnar member and the second columnar member; and a detector which outputs an electric signal showing an applied force based on displacements of the first columnar member and the second columnar member, wherein an upper end of the first columnar member is directly or indirectly joined to a lower surface of the upper structural body, and a lower end of the first columnar member is directly or indirectly joined to an upper surface of the lower structural body; an upper end of the second columnar member is directly or indirectly joined to a lower surface of the upper structural body, and a lower end of the second columnar member is directly or indirectly joined to an upper surface of the lower structural body; a projection image obtained by orthogonally projecting a central axis of the first columnar member onto an XZ plane is inclined in a first direction with respect to the Z-axis, and a projection image obtained by orthogonally projecting a central axis of the second columnar member onto the XZ plane is inclined in a second direction opposite to the first direction with respect to the Z-axis; at least a part of “
the lower structural body” and
at least a part of “
the upper structural body, the first columnar member, the second columnar member, and their mutual connection portions”
have flexibility so as to change the inclination state of the first columnar member and the second columnar member and allow the upper structural body to be displaced when an external force is applied to the upper structural body in a state where the lower structural body is fixed to a predetermined position; andthe detector includes a first sensor which detects a displacement in the Z-axis direction of the lower end of the first columnar member and a second sensor which detects a displacement in the Z-axis direction of the lower end of the second columnar member, and outputs an electric signal showing a difference between a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fx in an X-axis direction applied to the upper structural body in the state where the lower structural body is fixed to the predetermined position. - View Dependent Claims (15, 16, 17, 18)
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19. A force detection device which detects forces applied in predetermined directions in an XYZ three-dimensional coordinate system, comprising:
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an upper substrate having a substrate surface parallel to an XY plane; a lower substrate having a substrate surface parallel to the XY plane and disposed below the upper substrate; first to fourth X-axis columnar members having upper ends directly or indirectly joined to a lower surface of the upper substrate, and lower ends directly or indirectly joined to an upper surface of the lower substrate; first to fourth Y-axis columnar members having upper ends directly or indirectly joined to the lower surface of the upper substrate, and lower ends directly or indirectly joined to the upper surface of the lower substrate; and a detector which outputs electric signals showing applied forces based on displacements of the first to fourth X-axis columnar members and the first to fourth Y-axis columnar members, wherein vicinities of joined portions to which the lower ends of the first to fourth X-axis columnar members are joined with the lower substrate constitute first to fourth X-axis lower film portions with flexibility; vicinities of joined portions to which the lower ends of the first to fourth Y-axis columnar members are joined with the lower substrate constitute first to fourth Y-axis lower film portions with flexibility; a central axis of the first X-axis columnar member and a central axis of the second X-axis columnar member are included in an X-axis positive side orthogonal plane orthogonal to an X-axis in a positive region of the X-axis, and are inclined mutually opposite with respect to an XZ plane; a central axis of the third X-axis columnar member and a central axis of the fourth X-axis columnar member are included in an X-axis negative side orthogonal plane orthogonal to the X-axis in a negative region of the X-axis, and are inclined mutually opposite with respect to the XZ plane; a central axis of the first Y-axis columnar member and a central axis of the second Y-axis columnar member are included in a Y-axis positive side orthogonal plane orthogonal to the Y-axis in the positive region of the Y-axis, and are inclined mutually opposite with respect to the YZ plane; a central axis of the third Y-axis columnar member and a central axis of the fourth Y-axis columnar member are included in a Y-axis negative side orthogonal plane orthogonal to the Y-axis in the negative region of the Y-axis, and are inclined mutually opposite with respect to the YZ plane; and the detector includes;
a first X-axis sensor which detects a displacement in the Z-axis direction of the first X-axis lower film portion;
a second X-axis sensor which detects a displacement in the Z-axis direction of the second X-axis lower film portion;
a third X-axis sensor which detects a displacement in the Z-axis direction of the third X-axis lower film portion;
a fourth X-axis sensor which detects a displacement in the Z-axis direction of the fourth X-axis lower film portion;
a first Y-axis sensor which detects a displacement in the Z-axis direction of the first Y-axis lower film portion;
a second Y-axis sensor which detects a displacement in the Z-axis direction of the second Y-axis lower film portion;
a third Y-axis sensor which detects a displacement in the Z-axis direction of the third Y-axis lower film portion; and
a fourth Y-axis sensor which detects a displacement in the Z-axis direction of the fourth Y-axis lower film portion, and outputs electric signals obtained based on detection values of the sensors as detection values of forces applied to the upper substrate in the state where the lower substrate is fixed. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 54, 55, 56, 57, 58, 59, 60)
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31. A force detection device which detects forces applied in predetermined directions in an XYZ three-dimensional coordinate system, comprising:
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an upper structural body expanding on a plane parallel to an XY plane; a lower structural body expanding on a plane parallel to the XY plane and disposed below the upper structural body; first to fourth X-axis columnar members having upper ends directly or indirectly joined to a lower surface of the upper structural body, and lower ends directly or indirectly joined to an upper surface of the lower structural body; first to fourth Y-axis columnar members having upper ends directly or indirectly joined to a lower surface of the upper structural body, and lower ends directly or indirectly joined to an upper surface of the lower structural body; and a detector which outputs electric signals showing applied forces based on displacements of the first to fourth X-axis columnar members and the first to fourth Y-axis columnar members, wherein a central axis of the first X-axis columnar member and a central axis of the second X-axis columnar member are included in an X-axis positive side orthogonal plane orthogonal to an X-axis in a positive region of the X-axis, and are inclined mutually opposite with respect to an XZ plane; a central axis of the third X-axis columnar member and a central axis of the fourth X-axis columnar member are included in an X-axis negative side orthogonal plane orthogonal to the X-axis in a negative region of the X-axis, and are inclined mutually opposite with respect to the XZ plane; a central axis of the first Y-axis columnar member and a central axis of the second Y-axis columnar member are included in a Y-axis positive side orthogonal plane orthogonal to a Y-axis in a positive region of the Y-axis, and are inclined mutually opposite with respect to a YZ plane; a central axis of the third Y-axis columnar member and a central axis of the fourth Y-axis columnar member are included in a Y-axis negative side orthogonal plane orthogonal to the Y-axis in a negative region of the Y-axis, and are inclined mutually opposite with respect to the YZ plane; and the detector includes;
a first X-axis sensor which detects a displacement in a Z-axis direction of the lower end of the first X-axis columnar member;
a second X-axis sensor which detects a displacement in the Z-axis direction of the lower end of the second X-axis columnar member;
a third X-axis sensor which detects a displacement in the Z-axis direction of the lower end of the third X-axis columnar member;
a fourth X-axis sensor which detects a displacement in the Z-axis direction of the lower end of the fourth X-axis columnar member;
a first Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the first Y-axis columnar member;
a second Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the second Y-axis columnar member;
a third Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the third Y-axis columnar member; and
a fourth Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the fourth Y-axis columnar member, and outputs electric signals obtained based on detection values of the sensors as detection values of forces applied to the upper structural body in a state where the lower structural body is fixed to a predetermined position. - View Dependent Claims (32, 47, 48, 49, 50, 51, 52, 53)
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Specification