PLASMA PROCESSING CHAMBER WITH ENHANCED GAS DELIVERY
First Claim
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1. A vacuum processing chamber, comprising:
- a chamber body having an interior volume;
a substrate support pedestal disposed in the interior volume;
a lid enclosing the interior volume;
a gas distribution plate positioned below the lid and above the substrate support pedestal; and
a vortex inducing gas inlet oriented to induce a vortex of gas circulating in a plenum around a center line of the chamber body prior to the gas passing through the gas distribution plate.
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Abstract
A method and apparatus for providing flow into a processing chamber are provided. In one embodiment, a vacuum processing chamber is provided that includes a substrate support pedestal disposed in an interior volume of a chamber body, a lid enclosing the interior volume, a gas distribution plate positioned below the lid and above the substrate support pedestal, and a vortex inducing gas inlet oriented to induce a vortex of gas circulating in a plenum around a center line of the chamber body prior to the gas passing through the gas distribution plate.
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Citations
20 Claims
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1. A vacuum processing chamber, comprising:
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a chamber body having an interior volume; a substrate support pedestal disposed in the interior volume; a lid enclosing the interior volume; a gas distribution plate positioned below the lid and above the substrate support pedestal; and a vortex inducing gas inlet oriented to induce a vortex of gas circulating in a plenum around a center line of the chamber body prior to the gas passing through the gas distribution plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A vacuum processing chamber, comprising:
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a chamber body having an interior volume; a substrate support pedestal disposed in the interior volume; a lid enclosing the interior volume; a gas distribution plate positioned below the lid and above the substrate support pedestal; a plenum defined between the gas distribution plate and the lid; and a vortex inducing gas inlet oriented to induce a vortex of gas circulating in the plenum prior to the gas passing through the gas distribution plate. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A method for enhancing gas delivery in a plasma processing chamber, the method comprising:
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forming a vortex of gas upstream of a gas delivery plate; creating a radial pressure gradient in a plenum defined adjacent the gas delivery plate from the gas from the vortex; and flowing the gas from the plenum into an interior volume of the processing chamber. - View Dependent Claims (18, 19, 20)
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Specification