FIELD-EFFECT TRANSISTOR AND METHOD FOR FABRICATING FIELD-EFFECT TRANSISTOR
First Claim
1. A method for fabricating a field-effect transistor having a gate electrode, a source electrode, a drain electrode, and an active layer forming a channel region, the active layer having an oxide semiconductor mainly containing magnesium and indium, the method comprising:
- a deposition step of depositing an oxide film;
a patterning step of patterning the oxide film by processes including etching to obtain the active layer; and
a heat-treatment step of heat-treating the obtained active layer subsequent to the patterning step.
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Abstract
A method for fabricating a field-effect transistor having a gate electrode, a source electrode, a drain electrode, and an active layer forming a channel region, the active layer having an oxide semiconductor mainly containing magnesium and indium is disclosed. The method includes a deposition step of depositing an oxide film, a patterning step of patterning the oxide film by processes including etching to obtain the active layer, and a heat-treatment step of heat-treating the obtained active layer subsequent to the patterning step.
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Citations
13 Claims
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1. A method for fabricating a field-effect transistor having a gate electrode, a source electrode, a drain electrode, and an active layer forming a channel region, the active layer having an oxide semiconductor mainly containing magnesium and indium, the method comprising:
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a deposition step of depositing an oxide film; a patterning step of patterning the oxide film by processes including etching to obtain the active layer; and a heat-treatment step of heat-treating the obtained active layer subsequent to the patterning step. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A field-effect transistor comprising:
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a gate electrode configured to apply a gate voltage; a source electrode and a drain electrode configured to acquire a current; an active layer arranged adjacent to the source electrode and the drain electrode, the active layer forming a channel region and having an oxide semiconductor mainly containing magnesium and indium; and a gate insulating layer arranged between the gate electrode and the active layer, wherein a concentration of hydrogen atoms in the active layer near an interface between the active layer and the gate insulating film is equal to or lower than 1021/cm3. - View Dependent Claims (13)
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Specification