PATTERNING OF THIN FILM CONDUCTIVE AND PASSIVATION LAYERS

• US 20110006998A1
• Filed: 07/10/2009
• Published: 01/13/2011
• Est. Priority Date: 07/10/2009
• Status: Abandoned Application

• Current Assignee: Apple Inc.
• Original Assignee: Apple Inc.
• Inventors: KANG, SUNGGU, HUANG, LILI
• Application Number:
  US12/501,390
• Publication Number:
  US 20110006998A1
• Time in Patent Office: Days
• US Class Current: 345/173
• CPC Class Codes: G06F 2203/04111 Cross over in capacitive digitiser, i.e. details of structures for connecting electrodes of the sensing pattern where the connections cross each other, e.g. bridge structures comprising an insulating layer, or vias through substrate
• CPC Class Codes: G06F 3/0443 using a single layer of sensing electrodes
• CPC Class Codes: G06F 3/0446 using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes

Abstract

Simplified patterning of conductive layers and passivation layers of a thin film is disclosed. In some embodiments, the patterning can include depositing a conductive layer onto a thin film substrate, depositing a passivation layer onto the conductive layer, applying a removable mask including a desired pattern to the passivation layer, patterning the passivation layer to have the desired pattern, using the patterned passivation layer as a mask for the conductive layer, and patterning the conductive layer to have the desired pattern. In other embodiments, the patterning can include depositing a conductive layer onto a thin film substrate, depositing a passivation layer onto the conductive layer, depositing a protective layer onto the passivation layer, applying a removable mask including a desired pattern to the protective layer, patterning the protective layer to have the desired pattern, using the patterned protective layer as a mask for the passivation and conductive layers, and patterning the passivation and conductive layers to have the desired pattern. An exemplary device utilizing the thin film so patterned can include a touch sensor panel.

Claims

1. A method comprising:

depositing a conductive layer onto a surface;

depositing a passivation layer onto the conductive layer;

applying a removable mask including a pattern to the passivation layer;

patterning the passivation layer to have the pattern;

providing the patterned passivation layer as a mask for the conductive layer; and

patterning the conductive layer to have the pattern.

2. The method of claim 1, wherein depositing the conductive layer comprises depositing the conductive layer onto the surface to form a first set of conductive traces and a second set of conductive traces crossing each other, and to form conductive bridges at the crossings of the first and second sets of conductive traces, the first and second sets of conductive traces and the conductive bridges for transmitting signals, the surface including a patterned dielectric layer disposed on a patterned metal layer.

3. The method of claim 1, wherein depositing the conductive layer comprises depositing the conductive layer onto the surface to form multiple conductive traces adjacent to each other, the multiple conductive traces for bonding to other circuitry, the surface including a patterned metal layer.

4. The method of claim 1, wherein depositing the passivation layer comprises depositing a photosensitive passivation layer configured to react to light upon exposure to the light, the reaction eliminating portions of the passivation layer.

5. The method of claim 1, wherein applying the removable mask comprises applying a photo mask configured to include multiple portions, each portion transmitting different intensities of light.

6. The method of claim 1, wherein patterning the passivation layer comprises forming a pattern of different thicknesses of the passivation layer, the thicknesses ranging from a thickness portion of the layer being removed to a thickness portion of the layer being unchanged.

7. The method of claim 1, wherein providing the patterned passivation layer as a mask comprises providing portions of the pattern in which the passivation layer is eliminated so that the underlying conductive layer is exposed.

8. The method of claim 1, wherein patterning the conductive layer comprises forming a pattern corresponding to the passivation layer pattern, eliminated portions of the conductive layer corresponding to previously eliminated portions of the passivation layer.

9. The method of claim 1, comprising:

forming a conductive bridge configured to transmit signals along the conductive layer; and

forming a bonding area configured to connect to other circuitry,

wherein applying the removable mask comprises applying the mask having a first pattern and a second pattern, the first pattern being applied to the passivation layer deposited on the portion of the conductive layer forming the conductive bridge and the second pattern being applied to the passivation layer deposited on the portion of the conductive layer forming the bonding area, and

wherein patterning the passivation layer comprises forming different thicknesses for the portion of the passivation layer deposited on the portion of the conductive layer forming the conductive bridge and the portion of the passivation layer deposited on the portion of the conductive layer forming the bonding area.

10. The method of claim 9, comprising:

removing the passivation layer from the portion of the conductive layer forming the bonding area; and

reducing the thickness of the passivation layer on the portion of the conductive layer forming the conductive bridge.

11. A method comprising:

depositing a conductive layer onto a surface;

depositing a passivation layer onto the conductive layer;

depositing a protective layer onto the passivation layer;

applying a removable mask including a pattern to the protective layer;

patterning the protective layer to have the pattern;

providing the patterned protective layer as a mask for the passivation layer and the conductive layer; and

patterning the passivation layer and the conductive layer to have the pattern.

12. The method of claim 11, wherein depositing the passivation layer comprises depositing a non-photosensitive passivation layer configured to be insensitive to light.

13. The method of claim 11, wherein depositing the protective layer comprises depositing a photosensitive protective layer configured to react to light, the reaction eliminating portions of the protective layer.

14. The method of claim 11, comprising:

forming a conductive bridge configured to transmit signals along the conductive layer; and

forming a bonding area configured to connect to other circuitry,

wherein applying the removable mask comprises applying the mask having a first pattern to the protective layer deposited at the portion of the conductive layer forming the conductive bridge and having a second pattern to the protective layer deposited at the portion of the conductive layer forming the bonding area, and

wherein patterning the protective layer comprises forming different thicknesses for the portion of the protective layer deposited at the portion of the conductive layer forming the conductive bridge and the portion of the protective layer deposited at the portion of the conductive layer forming the bonding area.

15. The method of claim 14, comprising:

removing the protective layer from the portion of the conductive layer forming the bonding area;

removing the passivation layer from the portion of the conductive layer forming the bonding area; and

maintaining the protective layer at the portion of the conductive layer forming the conductive bridge during the removing of the passivation layer.

16. The method of claim 11, comprising removing the protective layer.

17. A touch sensor panel comprising:

a touch area comprising

a first set of conductive traces and a second set of conductive traces forming touch sensors to sense a touch at the panel, and

multiple conductive bridges at crossings of the first and second sets of conductive traces to separate the first and second conductive traces from each other and to conduct signals associated with the sensed touch along the first and second conductive traces at the crossings, each conductive bridge comprising a passivation layer disposed on the first and second conductive traces, the passivation layer and the first and second conductive traces formed together into a same pattern at the bridge; and

a bonding area comprising

a third set of conductive traces forming connectors to connect the panel to associated circuitry, each of the third conductive traces having the passivation layer removed therefrom.

18. The panel of claim 17 incorporated into at least one of a mobile telephone, a digital media player, or a personal computer.

19. A method comprising:

providing a conductive layer configured to transmit signals of an electronic device;

providing a passivation layer configured to protect the conductive layer; and

patterning the conductive layer and the passivation layer together into a same pattern.

20. The method of claim 19, comprising:

applying a first mask including the pattern to the passivation layer to form the passivation layer into the pattern; and

applying the patterned passivation layer as a second mask for the conductive layer to form the conductive layer into the pattern.

21. The method of claim 19, comprising applying a mask having multiple portions with different transparencies, the transparencies corresponding to the pattern.

22. The method of claim 19, comprising applying a mask having multiple portions with different slit densities, the slit densities corresponding to the pattern.

23. The method of claim 19, comprising applying a mask including the pattern to the passivation layer, the mask configured to adjust the thickness of the passivation layer according to the pattern.

24. A device comprising:

at least one conductive layer configured to transmit signals of the device; and

at least one passivation layer configured to protect the conductive layer from damage,

the passivation layer and the conductive layer formed into a same pattern on the device from a removable mask including the pattern to form the passivation layer into the pattern and from the patterned passivation layer functioning as a mask to form the conductive layer into the pattern.

25. The device of claim 24, comprising:

at least another conductive layer configured to connect the device to related circuitry, the at least another conductive layer formed into another pattern on the device with the passivation layer removed therefrom.