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PATTERNING OF THIN FILM CONDUCTIVE AND PASSIVATION LAYERS

  • US 20110006998A1
  • Filed: 07/10/2009
  • Published: 01/13/2011
  • Est. Priority Date: 07/10/2009
  • Status: Abandoned Application
First Claim
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1. A method comprising:

  • depositing a conductive layer onto a surface;

    depositing a passivation layer onto the conductive layer;

    applying a removable mask including a pattern to the passivation layer;

    patterning the passivation layer to have the pattern;

    providing the patterned passivation layer as a mask for the conductive layer; and

    patterning the conductive layer to have the pattern.

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