CONDENSATION AND CURING OF MATERIALS WITHIN A COATING SYSTEM
First Claim
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1. A method for delivering, condensing and curing materials within a deposition chamber, comprising:
- condensing material from a gas phase into a liquid phase on a target surface within the deposition chamber; and
solidifying the liquid phase of the material into a solid phase within the deposition chamber using a plasma.
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Abstract
Present embodiments are directed to a system and method for condensing and curing organic materials within a deposition chamber. Present embodiments may include condensing an organic component from a gas phase into a liquid phase on a target surface within the deposition chamber, wherein the gas phase of the organic component might be mixed with an inert gas. Further, present embodiments may include solidifying the liquid phase of the organic component into a solid phase within the deposition chamber using an inert plasma formed from the inert gas.
78 Citations
31 Claims
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1. A method for delivering, condensing and curing materials within a deposition chamber, comprising:
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condensing material from a gas phase into a liquid phase on a target surface within the deposition chamber; and solidifying the liquid phase of the material into a solid phase within the deposition chamber using a plasma. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A system, comprising:
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a deposition chamber; an inlet system capable of supplying organic material as a vapor and an inert gas in the deposition chamber; a condensation control system capable of controlling condensation of the organic material into a liquid phase on a target surface within the deposition chamber; and a solidification feature capable of initiating curing and/or cross-linking of the liquid phase of the organic material into a solid phase within the deposition chamber. - View Dependent Claims (17, 18, 19, 20, 21)
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22. A method comprising:
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flowing a precursor vapor into a deposition chamber via a heated inlet system, wherein the precursor vapor comprises a material in a gas phase and an inert gas; condensing the material into a stable liquid phase on a target surface of a component positioned on an electrode within the deposition chamber; and solidifying the stable liquid phase of the material disposed on the target surface into a solid layer within the deposition chamber. - View Dependent Claims (23, 24, 25)
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26. A method comprising:
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forming a smoothing layer on a target, comprising; condensing a material into a liquid phase on the target within the deposition chamber; and solidifying the liquid phase of the material disposed on the target within the deposition chamber to form the smoothing layer; and forming a barrier coating on the target within the deposition chamber. - View Dependent Claims (27, 28, 29, 30, 31)
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Specification