Remote Hydrogen Plasma With Ion Filter for Terminating Silicon Dangling Bonds

• US 20110008950A1
• Filed: 04/09/2010
• Published: 01/13/2011
• Est. Priority Date: 04/20/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Xu, Zhi
• Granted Patent: US 8,193,075 B2
• Time in Patent Office: Days
• US Class Current: 438/475
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01L 21/3003 Hydrogenation or deuterisation, e.g. using atomic hydrogen from a plasma
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/321 After treatment
• CPC Class Codes: H01L 21/425 producing ion implantation
• CPC Class Codes: H01L 31/03685 including microcrystalline silicon, uc-Si
• CPC Class Codes: H01L 31/03762 including only elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 31/075 the potential barriers being only of the PIN type, e.g. amorphous silicon PIN solar cells
• CPC Class Codes: H01L 31/1824 Special manufacturing methods for microcrystalline Si, uc-Si
• CPC Class Codes: H01L 31/1868 Passivation
• CPC Class Codes: H01L 31/202 including only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/545 Microcrystalline silicon PV cells
• CPC Class Codes: Y02E 10/548 Amorphous silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

Apparatus and methods for repairing silicon dangling bonds resulting from semiconductor processing are disclosed. The silicon dangling bonds can be repaired by introducing hydrogen radicals with substantially no hydrogen ions into the processing chamber to react with the silicon dangling bonds, eliminating them.

Claims

1. A method of processing a silicon layer on a substrate comprising:

disposing a substrate in a chamber having a remote plasma source coupled thereto;

processing a silicon layer and creating dangling silicon bonds in the silicon layer;

generating a hydrogen plasma in the remote plasma source, the hydrogen plasma comprising a mixture including hydrogen radicals and ions;

passing the hydrogen plasma through an ion filter to remove substantially all of the ions, creating a filtered hydrogen plasma; and

exposing the silicon layer containing dangling bonds to the filtered hydrogen plasma to remove dangling silicon bonds.

2. The method of claim 1, wherein processing the silicon layer includes one or more of etching or doping the silicon layer.

3. The method of claim 1, wherein processing the silicon layer comprises etching the silicon layer, creating dangling silicon bonds.

4. The method of claim 1, wherein processing the silicon layer comprises doping the silicon layer creating dangling silicon bonds.

5. The method of claim 1, wherein the hydrogen plasma is at a temperature less than about 400°

C.

6. The method of claim 1, wherein the hydrogen plasma is at a temperature less than about 300°

C.

7. The method of claim 1, wherein the silicon layer is in a gate electrode.

8. The method of claim 1, wherein the hydrogen radicals in the hydrogen plasma which have passed through the ion filter have an energy level that has been reduced to prevent damage to the silicon layer.

9. The method of claim 1, wherein the hydrogen radicals penetrate the silicon layer to a depth of less than about 3 μ

m.

10. The method of claim 1, wherein the hydrogen radicals penetrate the silicon layer to a depth of less than about 2 μ

m.

11. The method of claim 9, wherein the silicon layer is a p-type or n-type silicon which has been deposited onto a transparent conductive oxide layer deposited on a silicon substrate.

12. The method of claim 11, wherein the silicon layer is part of a photovoltaic cell, and the energy of the hydrogen radicals is such that they cause substantially no damage to the transparent conductive oxide layer.

13. The method of claim 4, wherein the silicon layer comprises a silicon oxide layer deposited on a silicon substrate, the silicon layer having one or more of P, As and BF₂ implanted therein.

14. The method of claim 7, wherein the gate electrode comprises polysilicon gates and the dangling bonds are created during an etching process.

15. The method of claim 3, wherein the method is part of a flash memory manufacturing process.

16. A method of processing a Si:

H layer on solar cell comprising;

disposing a substrate in a chamber having a remote plasma source coupled thereto;

creating dangling silicon bonds in the Si;

H layer;

generating a hydrogen plasma in the remote plasma source, the hydrogen plasma comprising a mixture including hydrogen radicals and ions;

passing the hydrogen plasma through an ion filter to remove essentially all of the ions, creating a filtered hydrogen plasma; and

exposing the Si;

H layer containing dangling bonds to the filtered hydrogen plasma to remove dangling silicon bonds.

17. The method of claim 16, wherein processing of the Si:

H layer occurs at a temperature below about 200°

C.

18. The method of claim 16, wherein the Si:

H layer comprises polysilicon.

19. The method of claim 16, wherein the Si:

H layer comprises micro-crystalline silicon.

20. The method of claim 19, wherein the Si:

H layer is disposed on a transparent conductive oxide layer and the plasma has substantially no negative impact the transparent conductive oxide layer.