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CAPACITIVE ACCELERATION SENSOR

  • US 20110011182A1
  • Filed: 04/12/2010
  • Published: 01/20/2011
  • Est. Priority Date: 07/16/2009
  • Status: Active Grant
First Claim
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1. A capacitive acceleration sensor comprising:

  • an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration;

    a sealing structure hermetically enclosing but not contacting said acceleration sensor moving part; and

    at least one support pillar enclosed by but not directly contacted by said acceleration sensor moving part, both ends of said at least one support pillar being in contact with inside walls of said sealing structure;

    wherein said acceleration sensor moving part is electrically connected to said at least one support pillar.

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