CAPACITIVE ACCELERATION SENSOR
First Claim
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1. A capacitive acceleration sensor comprising:
- an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration;
a sealing structure hermetically enclosing but not contacting said acceleration sensor moving part; and
at least one support pillar enclosed by but not directly contacted by said acceleration sensor moving part, both ends of said at least one support pillar being in contact with inside walls of said sealing structure;
wherein said acceleration sensor moving part is electrically connected to said at least one support pillar.
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Abstract
A capacitive acceleration sensor includes an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration, a sealing structure hermetically enclosing but not contacting the acceleration sensor moving part, and at least one support pillar enclosed by but not directly contacted by the acceleration sensor moving part, both ends of the at least one support pillar being in contact with inside walls of the sealing structure. The acceleration sensor moving part is electrically connected to the at least one support pillar.
9 Citations
4 Claims
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1. A capacitive acceleration sensor comprising:
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an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration; a sealing structure hermetically enclosing but not contacting said acceleration sensor moving part; and at least one support pillar enclosed by but not directly contacted by said acceleration sensor moving part, both ends of said at least one support pillar being in contact with inside walls of said sealing structure; wherein said acceleration sensor moving part is electrically connected to said at least one support pillar. - View Dependent Claims (3, 4)
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2. A capacitive acceleration sensor comprising:
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an acceleration sensor moving part and an acceleration sensor stationary part together forming a capacitor for detecting acceleration; a sealing structure hermetically enclosing but not contacting said acceleration sensor moving part; wherein the portions of said acceleration sensor moving part and said acceleration sensor stationary part that form said capacitor have a comb teeth shape; wherein said comb-teeth-shaped portion of said acceleration sensor stationary part includes at least one support pillar for said sealing structure; and wherein said at least one support pillar is enclosed by but not directly contacted by said acceleration sensor moving part, and both ends of said at least one support pillar are in contact with inside walls of said sealing structure.
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Specification