Plasma Gun and Plasma Gun Deposition System Including the Same
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Abstract
A plasma gun of the present invention includes: a container having a plasma outflow opening; a cathode (18) which is disposed inside the container to generate plasma by discharge; an auxiliary anode which is disposed to be able to be located between the plasma outflow opening and the cathode and is able to receive the plasma generated by the cathode; an exhaust valve for exhausting air from and sealing an inside of the container; and a plasma flow-out preventing/allowing device which prevents the plasma, having been generated by the discharge of the cathode, from flowing out from the plasma outflow opening and allows the plasma to flow out from the plasma.
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Citations
12 Claims
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1. (canceled)
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2. (canceled)
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3. (canceled)
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4. (canceled)
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5. (canceled)
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6. A plasma gun deposition system comprising:
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a plasma gun including a container having a plasma outflow opening, a cathode which is disposed inside the container to generate plasma by discharge, and an exhaust valve for exhausting air from and sealing the container; a deposition chamber which includes a plasma inflow opening, is disposed such that an inside thereof is in communication with an inside of the container through the plasma inflow opening and the plasma outflow opening, and is capable of reducing pressure of the inside thereof; an auxiliary anode which is disposed to be able to be located between the plasma inflow opening and the cathode and is able to receive the plasma generated by the cathode; a plasma flow-out preventing/allowing device which prevents the plasma, having been generated by the discharge of the cathode, from flowing in from the plasma inflow opening and allows the plasma to flow in from the plasma inflow opening; and a main anode disposed inside the deposition chamber; a magnet coil disposed between the cathode and the anode to allow the plasma to pass therethrough; a DC power supply whose negative terminal is connected to the cathode; and a selecting switch which selectively connects a positive terminal of the DC power supply with main anode and the auxiliary anode. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A method for operating a plasma gun deposition system comprising:
- a plasma gun including a container having a plasma outflow opening, a cathode which is disposed inside the container to generate plasma by discharge, and an exhaust valve for exhausting air from and sealing the container;
a deposition chamber which includes a plasma inflow opening, is disposed such that an inside thereof is in communication with an inside of the container through the plasma inflow opening and the plasma outflow opening, and is capable of reducing pressure of the inside thereof;
an auxiliary anode which is disposed to be able to be located between the plasma inflow opening and the cathode and is able to receive the plasma generated by the cathode;
a plasma flow-out preventing/allowing device which prevents the plasma, having been generated by the discharge of the cathode, from flowing in from the plasma inflow opening and allows the plasma to flow in from the plasma inflow opening;
a main anode disposed inside the deposition chamber;
a magnet coil disposed between the cathode and the anode to allow the plasma to pass therethrough;
a DC power supply whose negative terminal is connected to the cathode; and
a selecting switch which selectively connects a positive terminal of the DC power supply with the main anode and the auxiliary anode, the method comprising the steps of;preventing by the plasma flow-out preventing/allowing device the plasma, having been generated by the cathode, from flowing in from the plasma inflow opening and connecting by the selecting switch the positive terminal of the DC power supply with the auxiliary anode; generating the plasma by the cathode to receive the generated plasma by the auxiliary anode; and allowing by the plasma flow-out preventing/allowing device/be plasma, having been generated by the cathode, to flow in from the plasma inflow opening and connecting by the selecting switch the positive terminal of the DC power supply with the main anode.
- a plasma gun including a container having a plasma outflow opening, a cathode which is disposed inside the container to generate plasma by discharge, and an exhaust valve for exhausting air from and sealing the container;
Specification