Optical Positioner Design in X-Ray Analyzer for Coaxial Micro-Viewing and Analysis

• US 20110013744A1
• Filed: 07/16/2009
• Published: 01/20/2011
• Est. Priority Date: 07/16/2009
• Status: Active Grant

• Current Assignee: EDAX Incorporated (Ametek Incorporated)
• Original Assignee: EDAX Incorporated (Ametek Incorporated)
• Inventors: Scruggs, Bruce Elliott, Park, Sun, Westerdale, Bob, Nicolosi, Joseph A.
• Granted Patent: US 7,972,062 B2
• Time in Patent Office: Days
• US Class Current: 378/62
• CPC Class Codes: G01N 23/20 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
• CPC Class Codes: G01N 23/223 by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
• CPC Class Codes: G21K 7/00 Gamma- or X-ray microscopes

Abstract

An X-ray analyzer includes a sample stage for holding and positioning a sample and an optical positioner assembly configured above the sample stage. The optical positioner assembly includes a body member having an opening; an optical positioner located within the opening; and at least one X-ray optic and an optical viewing lens coupled to a first camera. The at least one X-ray optic and the optical viewing lens are secured to the optical positioner. The optical positioner is configured to align one of the at least one X-ray optic and the optic viewing lens normal to the sample on the sample stage such that the sample is irradiated with X-rays through the X-ray optic along a path which is normal to the sample and coaxial with the optic viewing lens receiving light reflected from the sample when the optic viewing lens is positioned normal to the sample.

Claims

1. An X-ray analyzer comprising:

a sample stage for holding and positioning a sample;

an optical positioner assembly configured above the sample stage, the optical positioner assembly comprising;

a body member having an opening;

an optical positioner provided within the opening for aligning optical components within the opening;

at least one X-ray optic secured to the optical positioner; and

an optical viewing lens coupled to a first camera secured to the optical positioner;

at least one X-ray tube optically coupled to the at least one X-ray optic; and

at least one X-ray detector positioned to view the sample through a port of the body member of the optical positioner assembly,

wherein the optical positioner is configured to align one of the at least one X-ray optic and the optical viewing lens normal to the sample on the sample stage such that the sample is irradiated with X-rays along a first path when the X-ray optic is positioned normal to the sample and the optical viewing lens receives light reflected from the sample along a second path when the optical viewing lens is positioned normal to the sample.

2. The X-ray analyzer of claim 1, wherein the first path and the second path are substantially coaxial.

3. The X-ray analyzer of claim 1, wherein the optical positioner assembly includes a plurality of X-ray optics secured to the optical positioner.

4. The X-ray analyzer of claim 3, wherein each of the plurality of X-ray optics provides an X-ray beam to the sample having a different spot size.

5. The X-ray analyzer of claim 3, wherein the plurality of X-ray optics are pin-hole collimators, monocapillaries, polycapillaries, monochromators, or any combination thereof so as to produce spectra optimized for one of X-ray fluorescence, diffraction, Compton scattering, and transmission radiography.

6. The X-ray analyzer of claim 1, wherein the optical positioner assembly further includes at least one optic secured to the optical positioner for providing an optical path for an Optical Spectrometer.

7. The X-ray analyzer of claim 1, wherein the body member of the optical positioner assembly contains a plurality of ports with direct access paths to analysis points on the sample.

8. The X-ray analyzer of claim 7, wherein at least one X-ray detector is positioned to view the sample through one of the plurality of ports provided in the body member of the optical positioner assembly, and wherein the X-ray detector is an Energy Dispersive Detector.

9. The X-ray analyzer of claim 7, wherein one of an Optical Spectrometer and an optical path for an Optical Spectrometer extend through one of the plurality of ports provided in the body member of the optical positioner assembly.

10. The X-ray analyzer of claim 7, further comprising a second camera positioned to view the sample through one of the plurality of ports provided in the body member of the optical positioner assembly.

11. The X-ray analyzer of claim 7, wherein the optical positioner assembly further comprises at least one laser extending through one of the plurality of ports of the body member for proper positioning of the sample stage.

12. The X-ray analyzer of claim 1, wherein the optical positioner is driven by a motive force.

13. The X-ray analyzer of claim 1, wherein an optical encoder is provided to interact with the optical positioner so as to provide accuracy in positioning one of the at least one X-ray optic and the optical viewing lens normal to the sample on the sample stage.

14. The X-ray analyzer of claim 1, wherein a second X-ray detector is positioned along the first path of the X-ray optic in such a way as to detect X-rays passing through the sample, and wherein the second X-ray detector is suitable for detecting high intensity X-rays.

15. The X-ray analyzer of claim 1, wherein the optical positioner is one of a rotary turret and an x-y stage.

16. An optical positioner assembly for use with an X-ray analyzer comprising:

a body member having an opening;

an optical positioner positioned within the opening;

at least one X-ray optic secured to the optical positioner; and

an optical viewing lens coupled to a first camera and secured to the optical positioner,

wherein the optical positioner is configured to align one of the at least one X-ray optic and the optical viewing lens normal to a sample.

17. The optical positioner assembly of claim 16, further comprising a plurality of X-ray optics secured to the optical positioner.

18. The optical positioner of claim 17, wherein each of the plurality of X-ray optics provides an X-ray beam from the X-ray tube to the sample having a different spot size.

19. The optical positioner assembly of claim 17, wherein the plurality of X-ray optics are pin-hole collimators, monocapillaries, polycapillaries, monochromators, or any combination thereof so as to produce spectra optimized for one of X-ray fluorescence, diffraction, Compton scattering, and transmission radiography.

20. The optical positioner assembly of claim 16, further comprising at least one IR to UV optic, at least one optical spectrometer, or any combination thereof secured to the optical positioner so as to be positioned normal to the sample and mutually coaxial with the optical viewing lens.

21. The optical positioner assembly of claim 16, wherein the body member of the optical positioner assembly contains a plurality of ports with direct access paths to analysis points on the sample.

22. The optical positioner assembly of claim 21, wherein at least one X-ray detector is positioned to view the sample through one of the plurality of ports provided in the body member of the optical positioner assembly, and wherein the X-ray detector is an Energy Dispersive Detector.

23. The optical positioner assembly of claim 21, wherein one of an Optical Spectrometer and an optical path for an Optical Spectrometer extend through one of the plurality of ports provided in the body member of the optical positioner assembly.

24. The optical positioner assembly of claim 21, further comprising a second camera positioned to view the sample through one of the plurality of ports provided in the body member of the optical positioner assembly.

25. The optical positioner assembly of claim 21, wherein the optical positioner assembly further comprises at least one laser extending through at least one of the plurality of ports of the body member for proper positioning of a sample stage of the X-ray analyzer.

26. The optical positioner assembly of claim 16, wherein the optical positioner is driven by a motive force.

27. The optical positioner assembly of claim 16, wherein an optical encoder is provided to interact with the optical positioner so as to provide accuracy in positioning one of the at least one X-ray optic and the optical viewing lens normal to the sample on the sample stage.

28. The optical positioner assembly of claim 16, wherein the optical positioner is one of a rotary turret and an x-y stage.

29. A method of analyzing a sample comprising the steps of:

providing an X-ray analyzer comprising;

a sample stage for holding and positioning a sample;

an optical positioner assembly configured above the sample stage, the optical positioner assembly comprising;

a body member having an opening;

an optical positioner provided within the opening for aligning optical components within the opening;

at least one X-ray optic secured to the optical positioner; and

an optical viewing lens coupled to a camera and secured to the optical positioner;

at least one X-ray tube optically coupled to the at least one X-ray optic; and

at least one X-ray detector positioned to view the sample through a port of the body member of the optical positioner assembly;

placing a sample on the sample stage;

aligning the optical positioner until the optical viewing lens is positioned normal to the sample;

imaging a portion of the sample using the camera by receiving light reflected from the sample along a first path to obtain an image of the sample; and

locating a point, points, or areas for analysis.

30. The method of claim 29, further comprising the step of aligning the optical positioner until the at least one X-ray optic is positioned along a second path normal to the sample.

31. The method of claim 30, wherein the first path is substantially coaxial with the second path.

32. The method of claim 31, wherein elemental information is obtained from a secondary X-ray fluorescence spectra obtained by the X-ray detector.

33. The method of claim 31, wherein interatomic d-spacing information is obtained from a secondary X-ray diffraction spectra obtained by the X-ray detector.

34. The method of claim 31, wherein atomic mass information is obtained from a secondary X-ray Compton spectra obtained by the X-ray detector.

35. The method of claim 31, wherein X-ray absorption information is obtained from X-rays transmitted through a sample obtained by the X-ray detector.

36. The method of claim 31, wherein the optical positioner assembly further includes at least one optic secured to the optical positioner for providing an optical path for an Optical Spectrometer.

37. The method of claim 36, wherein molecular bonding information is obtained from an optical spectra obtained by the Optical Spectrometer.

38. The method of claim 31, further comprising the step of:

correlating pixels of an image of the sample with one or more physical parameters of the sample.

39. The method of claim 38, wherein the one or more physical parameters are elemental composition, atomic spacing, atomic mass, X-ray absorption, molecular bonding, or any combination thereof.