METHOD AND DEVICE FOR MODULATING LIGHT
First Claim
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1. A device, comprising:
- a substrate of at least about 14 inches by 16 inches in size;
a deposited material;
an array of electromechanical devices formed on the substrate, the electromechanical devices each comprising a movable first electrode layer, a first insulator, and a second electrode; and
a plurality of transistors formed on the substrate, each of the plurality of transistors comprising a gate, a second insulator, and an electrode, and each of the plurality of transistors electrically coupled to at least one of the movable first electrode layer and a second electrode of an electromechanical device in the array,wherein a portion of one of the movable first electrode layer, the first insulator, and the second electrode of each electromechanical device, and a portion of one of the gate, the second insulator, and the electrode of each transistor, each comprise a portion of the deposited material.
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Abstract
Improvements in an interferometric modulator that has a cavity defined by two walls.
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Citations
20 Claims
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1. A device, comprising:
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a substrate of at least about 14 inches by 16 inches in size; a deposited material; an array of electromechanical devices formed on the substrate, the electromechanical devices each comprising a movable first electrode layer, a first insulator, and a second electrode; and a plurality of transistors formed on the substrate, each of the plurality of transistors comprising a gate, a second insulator, and an electrode, and each of the plurality of transistors electrically coupled to at least one of the movable first electrode layer and a second electrode of an electromechanical device in the array, wherein a portion of one of the movable first electrode layer, the first insulator, and the second electrode of each electromechanical device, and a portion of one of the gate, the second insulator, and the electrode of each transistor, each comprise a portion of the deposited material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a drive circuit for an array of electromechanical devices that is at least about 14 inches by 16 inches in size, the method comprising:
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depositing a material in a layer on a substrate; forming an array of electromechanical devices on the substrate, each device comprising a movable first electrode layer, a first insulator, and a second electrode, wherein a portion of one of the movable first electrode layer, the first insulator, and the second electrode comprises a portion of the deposited material; and forming a transistor on the substrate, the transistor comprising a gate, a second insulator, and an electrode, wherein a portion of one of the gate, the second insulator, and the electrode of the transistor comprises a portion of the deposited material. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification