Handling device and handling method of quartz glass crucible
First Claim
1. A crucible handling device for sandwiching and moving a quartz glass crucible, comprising:
- a frame having a beam extending in a horizontal direction and a pair of arms protruding from the beam in a direction perpendicular to a central axis direction of the beam such that at least one of the arms is able to move in the central axis direction of the beam;
a pair of sandwiching means assembled with the pair of the arm to face each other, for sandwiching a body of the quartz glass crucible in a radial direction of the quartz glass crucible;
engagement means provided adjacent to each sandwiching means and formed by a pair of tongues movable to approach or be separated from each other in a central axis direction of the quartz glass crucible, for sandwiching and holding the quartz glass crucible between the tongues in the central axis direction of the quartz glass crucible; and
driving means for causing the frame to reciprocate along the central axis of the quartz glass crucible.
1 Assignment
0 Petitions
Accused Products
Abstract
An object of the present invention is to provide a crucible handling device that can firmly sandwich and reliably move a quartz glass crucible under a clean environment and a method of handling a quartz glass crucible using the crucible handling device. The present invention provides a crucible handling device 1 for handling a quartz glass crucible 5, the device including: a frame 4 having a beam 2 extending in a horizontal direction and a pair of arms 3 protruding from the beam 2 in a direction perpendicular to a central axis line direction of the beam 2 such that at least one of the arms 3 is able to move in the central axis line direction of the beam 2; a pair of sandwiching means 6 assembled with the pair of the arm 3 to face each other, for sandwiching a body 50 of the quartz glass crucible 5 in a radial direction of the crucible; engagement means 7 provided adjacent to each sandwiching means 6 and formed by a pair of tongues 70 movable to approach or be separated from each other in a central axis direction of the crucible, for sandwiching and holding the quartz glass crucible 5 therebetween in the central axis direction of the crucible; and driving means 8 for causing the sandwiching means 6 and the engagement means 7 to reciprocate along the arm 3. The present invention also provides a method of handling a quartz glass crucible using such a device 1 as described above.
22 Citations
9 Claims
-
1. A crucible handling device for sandwiching and moving a quartz glass crucible, comprising:
-
a frame having a beam extending in a horizontal direction and a pair of arms protruding from the beam in a direction perpendicular to a central axis direction of the beam such that at least one of the arms is able to move in the central axis direction of the beam; a pair of sandwiching means assembled with the pair of the arm to face each other, for sandwiching a body of the quartz glass crucible in a radial direction of the quartz glass crucible; engagement means provided adjacent to each sandwiching means and formed by a pair of tongues movable to approach or be separated from each other in a central axis direction of the quartz glass crucible, for sandwiching and holding the quartz glass crucible between the tongues in the central axis direction of the quartz glass crucible; and driving means for causing the frame to reciprocate along the central axis of the quartz glass crucible. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
Specification