Dual Scanning Stage
First Claim
1. A profilometer, comprising:
- a guide beam for providing translational movement of substrates in a Y axis relative to a stylus,a first stage for receiving a first substrate, the first stage slidably mounted to the guide beam, the first stage associated with a first motor for providing independent translational movement for the first stage in an X axis relative to the stylus,a second stage for receiving a second substrate, the second stage slidably mounted to the guide beam, the second stage associated with a second motor for providing independent translational movement for the second stage in the X axis relative to the stylus,where the first stage and the second stage move together in the Y axis as the guide beam moves in the Y axis, and move independently of one another in the X axis,a robot for loading the substrates onto and unloading the substrates off of the first stage and the second stage, anda controller for directing the robot to load the second substrate onto the second stage, while simultaneously directing the first stage and the guide beam to scan the first substrate on the first stage in the X and Y axes under the stylus, thereby generating profile readings of the first substrate on the first stage.
1 Assignment
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Accused Products
Abstract
A profilometer having a guide beam for providing translational movement of substrates in a Y axis relative to a stylus. A first stage receives a first substrate, where the first stage is slidably mounted to the guide beam. The first stage is associated with a first motor for providing independent translational movement for the first stage in an X axis relative to the stylus. A second stage receives a second substrate, where the second stage is slidably mounted to the guide beam. The second stage is associated with a second motor for providing independent translational movement for the second stage in the X axis relative to the stylus, where the first stage and the second stage move together in the Y axis as the guide beam moves in the Y axis, and move independently of one another in the X axis. A robot loads the substrates onto and unloads the substrates off of the first stage and the second stage. A controller directs the robot to load the second substrate onto the second stage, while simultaneously directing the first stage and the guide beam to scan the first substrate on the first stage in the X and Y axes under the stylus, thereby generating profile readings of the first substrate on the first stage.
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Citations
12 Claims
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1. A profilometer, comprising:
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a guide beam for providing translational movement of substrates in a Y axis relative to a stylus, a first stage for receiving a first substrate, the first stage slidably mounted to the guide beam, the first stage associated with a first motor for providing independent translational movement for the first stage in an X axis relative to the stylus, a second stage for receiving a second substrate, the second stage slidably mounted to the guide beam, the second stage associated with a second motor for providing independent translational movement for the second stage in the X axis relative to the stylus, where the first stage and the second stage move together in the Y axis as the guide beam moves in the Y axis, and move independently of one another in the X axis, a robot for loading the substrates onto and unloading the substrates off of the first stage and the second stage, and a controller for directing the robot to load the second substrate onto the second stage, while simultaneously directing the first stage and the guide beam to scan the first substrate on the first stage in the X and Y axes under the stylus, thereby generating profile readings of the first substrate on the first stage. - View Dependent Claims (2, 3, 4)
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5. A method of profiling a first substrate and a second substrate, the method comprising the steps of:
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loading the first substrate onto a first stage, scanning the first stage in an X axis and a Y axis, generating profile readings of the first substrate with a stylus, loading the second substrate onto a second stage while continuing to generate the profile readings of the first substrate, scanning the second stage in the X axis and the Y axis, where movement in the X axis is independent between the first stage and the second stage, and movement in the Y axis is not independent between the first stage and the second stage, and generating profile readings of the second substrate with the stylus while the first substrate is unloaded from the first stage. - View Dependent Claims (6, 7)
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8. A profilometer, comprising:
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a guide beam for providing translational movement of substrates in a Y axis relative to a stylus, a first stage for receiving a first substrate, the first stage slidably mounted to the guide beam, a second stage for receiving a second substrate, the second stage slidably mounted to the guide beam, a motor for providing translational movement for the first stage and the second stage in an X axis relative to the stylus, where the first stage and the second stage move together in the Y axis as the guide beam moves in the Y axis, and move together in the X axis according to the operation of the motor, and a robot for loading the substrates onto and unloading the substrates off of the first stage and the second stage. - View Dependent Claims (9, 10, 11, 12)
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Specification