DEVICES COMPRISING NANOTUBES FOR USE AS SENSORS AND/OR TRANSDUCERS, AND RELATED METHODS

• US 20110023608A1
• Filed: 10/11/2010
• Published: 02/03/2011
• Est. Priority Date: 06/25/2007
• Status: Active Grant

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Rueger, Neal R.
• Granted Patent: US 8,256,293 B2
• Time in Patent Office: Days
• US Class Current: 73/579
• CPC Class Codes: G01H 11/00 Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
• CPC Class Codes: H03H 3/0077 by tuning of resonance frequency

Abstract

Devices usable as sensors, as transducers, or as both sensors and transducers include one or more nanotubes or nanowires. In some embodiments, the devices may each include a plurality of sensor/transducer devices carried by a common substrate. The sensor/transducer devices may be individually operable, and may exhibit a plurality of resonant frequencies to enhance the operable frequency bandwidth of the devices. Sensor/transducer devices include one or more elements configured to alter a resonant frequency of a nanotube. Such elements may be selectively and individually actuable. Methods for sensing mechanical displacements and vibrations include monitoring an electrical characteristic of a nanotube. Methods for generating mechanical displacements and vibrations include using an electrical signal to induce mechanical displacements or vibrations in one or more nanotubes. Methods for adjusting an electrical signal include passing an electrical signal through a nanotube and changing a resonant frequency of the nanotube.

Claims

1. A sensor/transducer device, comprising:

at least one nanotube having a first end structurally and electrically coupled to a first electrode and a second end structurally and electrically coupled to a second electrode; and

at least one element located laterally adjacent the at least one nanotube and configured to adjust a resonant frequency of the at least one nanotube by bearing on a lateral side surface of the at least one nanotube.

2. The device of claim 1, wherein the at least one nanotube comprises a plurality of nanotubes, each nanotube of the plurality of nanotubes having a first end structurally and electrically coupled to a respective first electrode of a plurality of first electrodes and a second end structurally and electrically coupled to a respective second electrode of a plurality of second electrodes.

3. The device of claim 2, wherein the nanotubes of the plurality of nanotubes exhibit a plurality of different resonant frequencies.

4. The device of claim 3, wherein the nanotubes of the plurality of nanotubes have varying lengths.

5. The device of claim 1, wherein the at least one element comprises at least one piezoelectric element.

6. The device of claim 5, wherein the at least one piezoelectric element comprises a plurality of piezoelectric elements, each piezoelectric element of the plurality of piezoelectric elements configured to impinge on the at least one nanotube at a different location along a length of the at least one nanotube.

7. A sensor/transducer device comprising a plurality of nanotubes configured to exhibit a plurality of resonant frequencies, each nanotube of the plurality of nanotubes having at least a first end structurally and electrically coupled to an electrode, wherein at least one nanotube of the plurality of nanotubes has a first length, at least one nanotube of the plurality of nanotubes has a second length differing from the first length, at least one nanotube of the plurality of nanotubes being oriented in a first direction, and at least one nanotube of the plurality of nanotubes being oriented in a second direction oriented at an angle relative to the first direction.

8. The device of claim 7, wherein each nanotube of the plurality of nanotubes has a second end structurally and electrically coupled to another electrode.

9. The device of claim 8, further comprising additional electrodes, each positioned proximate an intermediate section of a corresponding nanotube of the plurality of nanotubes, each of the additional electrodes configured to affect or sense a capacitance between each of the additional electrodes and the corresponding nanotubes.

10. The device of claim 7, further comprising additional electrodes, each positioned proximate a second end of a corresponding nanotube of the plurality of nanotubes, each of the additional electrodes configured to affect or sense a capacitance between each of the additional electrodes and the corresponding nanotubes.

11. The device of claim 7, further comprising a plurality of piezoelectric elements, each configured to adjust a resonant frequency of at least one nanotube of the plurality of nanotubes.

12. A method of sensing mechanical movement in a medium, the method comprising adjusting a resonant frequency of at least one nanotube in the medium while measuring at least one electronic characteristic of the at least one nanotube, wherein adjusting a resonant frequency of the at least one nanotube comprises causing at least one element to impart a force on a lateral side surface of at least a portion of the at least one nanotube.

13. The method of claim 12, wherein measuring at least one electronic characteristic of the at least one nanotube comprises measuring a capacitance between the at least one nanotube and an electrode located proximate the at least one nanotube.

14. The method of claim 12, wherein adjusting a resonant frequency of the at least one nanotube comprises generating a tensile or compressive stress in at least a portion of the at least one nanotube.

15. A method of sensing mechanical movement in a medium, comprising:

measuring at least one electronic characteristic of each of a plurality of nanotubes disposed in the medium and having different resonant frequencies; and

determining at least one of a previously unknown direction and a previously unknown velocity of at least one mechanical wave passing through the medium.

16. The method of claim 15, wherein measuring at least one electronic characteristic of each of the plurality of nanotubes comprises measuring a current passing through each of the plurality of nanotubes.

17. The method of claim 15, wherein measuring at least one electronic characteristic of each of a plurality of nanotubes disposed in the medium comprises measuring at least one electronic characteristic of each of a plurality of nanotubes disposed in the medium and oriented in a plurality of directions.

18. A device, comprising:

at least one nanotube carried by a substrate;

at least one electrode in electrical contact with the at least one nanotube; and

at least one actuable structure carried by the substrate and configured to abut against a lateral side surface of the at least one nanotube in an actuated position.

19. The device of claim 18, wherein the at least one actuable structure is configured to impart a variable force on the lateral side surface of the at least one nanotube.

20. The device of claim 18, wherein the at least one actuable structure comprises at least one piezoelectric element.

21. The device of claim 20, wherein the at least one piezoelectric element is configured to abut against the at least one nanotube at an intermediate location along a length of the at least one nanotube.

22. The device of claim 21, wherein the at least one piezoelectric element comprises a plurality of piezoelectric elements, each configured to abut against the at least one nanotube at a different location along the length of the at least one nanotube.

23. A method of encoding, comprising:

applying a voltage to a nanotube; and

encoding an electrical signal by adjusting a resonant frequency of the nanotube using at least one device configured to apply a mechanical force to the nanotube while passing electrical current through the nanotube.

24. The method of claim 23, further comprising selecting the at least one device configured to apply a mechanical force to the nanotube to comprise a piezoelectric device.

25. The method of claim 23, further comprising inducing vibrations in the nanotube.