SiC AVALANCHE PHOTODIODE WITH IMPROVED EDGE TERMINATION
First Claim
Patent Images
1. An avalanche photodiode semiconductor device of the type for converting an impinging photon into an electrical current comprising:
- a base n+ doped substrate composed of a first material and having a window section where the base n+ doped substrate has been removed for passing the photon impinging on the avalanche photodiode device;
a first n−
doped layer of said first material formed on top of the base n+ doped substrate and having a portion of a lower surface suitably exposed through the window section for receiving the photon impinging on the avalanche photodiode device;
a second upper n+ doped layer of said first material formed on the first n−
doped layer with the first n−
doped layer located between the base n+ doped substrate and the second upper n+ doped layer;
a third epitaxially grown p+ doped layer of said first material formed on top of the second upper n+ doped layer such that the second upper n+ doped layer is formed sandwiched between the first n−
doped layer and the third epitaxially grown p+ doped layer;
a pair of conductive metal contacts; and
,at least one planar floating guard ring formed below the third epitaxially grown p+ doped layer, separated from the third epitaxially grown p+ doped layer, and doped at a level that is different than that of the third epitaxially grown p+ doped layer,wherein a first contact is formed with the base n+ doped substrate and a second contact is formed with the third epitaxially grown p+ doped layer.
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Abstract
An avalanche photodiode semiconductor device (20) for converting an impinging photon (22) includes a base n+ doped material layer (52) formed having a window section (72) for passing the photon (22). An n− doped material layer (30) is formed on the n+ doped material layer (52) having a portion of a lower surface (74) suitably exposed. An n+ doped material layer (32) is formed on the n− doped material (30). A p+ layer (24) formed on top of the n+ doped layer (32). At least one guard ring (26) is formed in the n− doped layer (30).
33 Citations
35 Claims
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1. An avalanche photodiode semiconductor device of the type for converting an impinging photon into an electrical current comprising:
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a base n+ doped substrate composed of a first material and having a window section where the base n+ doped substrate has been removed for passing the photon impinging on the avalanche photodiode device; a first n−
doped layer of said first material formed on top of the base n+ doped substrate and having a portion of a lower surface suitably exposed through the window section for receiving the photon impinging on the avalanche photodiode device;a second upper n+ doped layer of said first material formed on the first n−
doped layer with the first n−
doped layer located between the base n+ doped substrate and the second upper n+ doped layer;a third epitaxially grown p+ doped layer of said first material formed on top of the second upper n+ doped layer such that the second upper n+ doped layer is formed sandwiched between the first n−
doped layer and the third epitaxially grown p+ doped layer;a pair of conductive metal contacts; and
,at least one planar floating guard ring formed below the third epitaxially grown p+ doped layer, separated from the third epitaxially grown p+ doped layer, and doped at a level that is different than that of the third epitaxially grown p+ doped layer, wherein a first contact is formed with the base n+ doped substrate and a second contact is formed with the third epitaxially grown p+ doped layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. An array structure comprising at least two avalanche photodiodes (APDs), wherein each avalanche photodiode comprises:
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a base n+ doped substrate composed of a first material and having a window section where the base n+ doped substrate has been removed for passing the photon impinging on the avalanche photodiode device; a first n−
doped layer of said first material formed on top of the base n+ doped substrate and having a portion of a lower surface suitably exposed through the window section for receiving the photon impinging on the avalanche photodiode device;a second upper n+ doped layer of said first material formed on the first n−
doped layer with the first n−
doped layer located between the base n+ doped substrate and the second upper n+ doped layer;a third epitaxially grown p+ doped layer of said first material formed on top of the second upper n+ doped layer such that the second upper n+ doped layer is formed sandwiched between the first n−
doped layer and the third epitaxially grown p+ doped layer; and
,a passivation layer for providing electrical passivation and radiation hardness on a surface of the avalanche photodiode at least one planar guard ring formed in the first n−
doped layer and separated from the second upper n+ doped layer and the third epitaxially grown p+ doped layer. - View Dependent Claims (29, 30, 31)
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32. An array structure comprising at least two avalanche photodiodes (APDs), wherein each avalanche photodiode comprises:
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a base n+ doped substrate composed of a first material and having a window section where the base n+ doped substrate has been removed for passing the photon impinging on the avalanche photodiode device; a first n−
doped layer of said first material formed on top of the base n+ doped substrate and having a portion of a lower surface suitably exposed through the window section for receiving the photon impinging on the avalanche photodiode device;a second upper n+ doped layer of said first material formed on the first n−
doped layer with the first n−
doped layer located between the base n+ doped substrate and the second upper n+ doped layer;a third epitaxially grown p+ doped layer of said first material formed on top of the second upper n+ doped layer such that the second upper n+ doped layer is formed sandwiched between the first n−
doped layer and the third epitaxially grown p+ doped layer; and
,a passivation layer for providing electrical passivation and radiation hardness on a surface of the avalanche photodiode at least one planar guard ring formed partially or in its entirety in the second upper n+ doped layer and separated from the third epitaxially grown p+ doped layer. - View Dependent Claims (33, 34, 35)
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Specification