NONVOLATILE SEMICONDUCTOR MEMORY
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Abstract
A nonvolatile semiconductor memory according to an aspect of the invention comprises a semiconductor substrate which has an SOI region and an epitaxial region at its surface, a buried oxide film arranged on the semiconductor substrate in the SOI region, an SOI layer arranged on the buried oxide film, a plurality of memory cells arranged on the SOI layer, an epitaxial layer arranged in the epitaxial region, and a select gate transistor arranged on the epitaxial layer, wherein the SOI layer is made of a microcrystalline layer.
19 Citations
20 Claims
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1-8. -8. (canceled)
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9. A nonvolatile semiconductor memory comprising:
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a semiconductor substrate; a pillar-shaped semiconductor layer which extends in a vertical direction toward the surface of the semiconductor substrate; a plurality of memory cells which are arranged in the vertical direction on the side face of the semiconductor layer and each of which has a charge storage layer and a control gate electrode, wherein the pillar-shaped semiconductor layer is made of a microcrystalline layer; - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification