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METHOD FOR TESTING PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE, TESTING APPARATUS, AND METHOD FOR ADJUSTING PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE

  • US 20110025171A1
  • Filed: 10/15/2010
  • Published: 02/03/2011
  • Est. Priority Date: 04/18/2008
  • Status: Active Grant
First Claim
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1. A method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies.

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