METHOD AND DEVICE FOR MULTI-COLOR INTERFEROMETRIC MODULATION
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Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.
112 Citations
72 Claims
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1-53. -53. (canceled)
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54. An array of light modulators, comprising:
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at least two modulators arranged so as to form one resulting picture element; and each modulator comprising a mirror suspended over a cavity by supports, the supports formed such that each modulator corresponding to each color assumes a quiescent state corresponding to a cavity with a different dimension. - View Dependent Claims (55, 56, 57, 58)
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59. An array of light modulators, comprising:
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a first modulator, said first modulator comprising a reflective element suspended over a first cavity by supports, wherein the first modulator assumes a quiescent state corresponding to a first color based on, at least in part, a first dimension of the first cavity; and a second modulator, said second modulator comprising a reflective element suspended over a second cavity by supports, wherein the supports are formed such that the second modulator assumes a quiescent state corresponding to a second color based on, at least in part, a second dimension of the second cavity. - View Dependent Claims (60, 61, 62, 63)
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64. An array of light modulators, comprising:
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first means for modulating light, wherein said first means comprises a first cavity with a first dimension and wherein said first means is associated with a first color based on, at least in part, the first dimension; and second means for modulating light, wherein said second means comprises a second cavity with a second dimension and wherein said second means is associated with a second color based on, at least in part, the second dimension. - View Dependent Claims (65, 66, 67, 68)
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69. A method of manufacturing a light modulator, the method comprising:
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forming an electrode and optical stack on the back of a transparent substrate; depositing a first sacrificial layer with at least two thicknesses upon the electrode and optical stack, the thickness deposited for a modulator being dependent upon a color designation of that modulator; forming mirrors on the first sacrificial layer; and removing the first sacrificial layers. - View Dependent Claims (70, 71, 72)
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Specification