METHOD OF MANUFACTURING VERTICAL CAVITY SURFACE EMITTING LASER AND METHOD OF MANUFACTURING LASER ARRAY, VERTICAL CAVITY SURFACE EMITTING LASER AND LASER ARRAY, AND IMAGE FORMING APPARATUS WITH LASER ARRAY
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Abstract
A method of manufacturing a vertical cavity surface emitting laser of a mesa structure, the method comprises: sequentially laminating on a substrate a plurality of semiconductor layers including a bottom reflecting mirror, an active layer, a selective oxidation layer and a top reflecting mirror, followed by forming a dielectric film on the laminated semiconductor layers; forming on the dielectric film a first resist pattern comprised of large and small annular opening patterns and large and small annular resist patterns around the same central axis; forming the large and small annular opening patterns in the dielectric film; forming a second resist pattern in the dielectric film so that only the small annular opening pattern is exposed, followed by forming an annular electrode in the exposed small annular opening pattern; and forming a third resist pattern over the annular electrode.
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Citations
15 Claims
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1-9. -9. (canceled)
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10. An image forming apparatus comprising, as a light source, a vertical cavity surface emitting laser array obtained by arranging a plurality of vertical cavity surface emitting lasers formed according to a method of manufacturing a vertical cavity surface emitting laser that includes:
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sequentially laminating on a substrate a plurality of semiconductor layers including a bottom reflecting minor, an active layer, a selective oxidation layer, and a top reflecting mirror, followed by forming a dielectric film on the laminated semiconductor layers; forming on the dielectric film a first resist pattern that includes large and small annular opening patterns having a same central axis; forming the large and small annular opening patterns in the dielectric film, using the first resist pattern; forming a second resist pattern on the dielectric film with the large and small annular opening patterns so that only the small annular opening pattern is exposed, followed by forming an annular electrode in the exposed small annular opening pattern; and forming a third resist pattern over the annular electrode to form a mesa structure that includes the large annular opening pattern formed in the dielectric film and the third resist pattern.
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11. A vertical cavity surface emitting laser of a mesa structure comprising:
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a bottom reflecting mirror; an active layer; a current confinement structure; and a top reflecting mirror including an annular electrode, wherein the mesa structure has an annular planar shape, a central axis of the annular shaped mesa structure is same as a central axis of the annular electrode, and the annular shaped mesa structure has a larger outer diameter than that of the annular electrode. - View Dependent Claims (12, 13, 14)
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15. (canceled)
Specification