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ASSEMBLY METHOD OF TRANSFER MECHANISM AND TRANSFER CHAMBER

  • US 20110027058A1
  • Filed: 07/30/2010
  • Published: 02/03/2011
  • Est. Priority Date: 07/31/2009
  • Status: Active Grant
First Claim
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1. An assembly method of a transfer mechanism which transfers a target and includes a pick unit for holding the target, a slide unit for sliding the pick unit and a drive unit for driving the slide unit, the assembly method comprising:

  • installing a lifting mechanism for lifting the units at a ceiling portion of a transfer chamber where the transfer mechanism is accommodated; and

    assembling the units loaded into the transfer chamber inside the transfer chamber by using the lifting mechanism.

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