ASSEMBLY METHOD OF TRANSFER MECHANISM AND TRANSFER CHAMBER

• US 20110027058A1
• Filed: 07/30/2010
• Published: 02/03/2011
• Est. Priority Date: 07/31/2009
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Kai, Yoshihiro, YAMADA, Youhei
• Granted Patent: US 8,499,430 B2
• Time in Patent Office: Days
• US Class Current: 414/751.1
• CPC Class Codes: B65G 2249/02 Controlled or contamination-free environments or clean space conditions
• CPC Class Codes: B65G 2249/04 Arrangements of vacuum systems or suction cups
• CPC Class Codes: B65G 49/061 Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames suction means as load-engaging elements attached to the lifting or lowering gear of cranes B66C1/02; suction cups for attaching purposes F16B47/00; suction cups on gripping heads B25J15/0616; suction cups in general B65G47/91; suction cups combined with cutting means on vertical conveyors C03B33/00 - C03B33/10; devices for turning sheets B65G49/067; suspending devices B65G49/066
• CPC Class Codes: B65G 49/066 being suspended; Suspending devices, e.g. clamps, supporting tongs
• CPC Class Codes: B65G 49/067 Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass suction cups B65G49/061; combined with vertical conveyors C03B33/00 - C03B33/10; stacking and destacking B65G49/068
• CPC Class Codes: B65G 49/068 Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces stacking in general B65G57/00; destacking in general B65G59/00; spacer sheets in general B65H
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67754 horizontal transfer of a batch of workpieces
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/53539 including work conveyor
• CPC Class Codes: Y10T 29/53543 including transporting track
• CPC Class Codes: Y10T 29/53548 and work carrying vehicle

Abstract

An assembly method is capable of assembling a transfer mechanism which transfers a target and includes a pick unit for holding the target, a slide unit for sliding the pick unit and a drive unit for driving the slide unit. The assembly method includes installing a lifting mechanism for lifting the units at a ceiling portion of a transfer chamber where the transfer mechanism is accommodated; and assembling the units loaded into the transfer chamber inside the transfer chamber by using the lifting mechanism.

Claims

1. An assembly method of a transfer mechanism which transfers a target and includes a pick unit for holding the target, a slide unit for sliding the pick unit and a drive unit for driving the slide unit, the assembly method comprising:

installing a lifting mechanism for lifting the units at a ceiling portion of a transfer chamber where the transfer mechanism is accommodated; and

assembling the units loaded into the transfer chamber inside the transfer chamber by using the lifting mechanism.

2. The assembly method of claim 1, wherein the units are loaded into the transfer chamber by using a rail member inserted from an outside of the transfer chamber into an inside of the transfer chamber and a moving carriage that moves along the rail member.

3. A transfer chamber having therein a transfer mechanism which transfers a target and includes a pick unit for holding the target, a slide unit for sliding the pick unit and a drive unit for driving the slide unit,

wherein a detachable lifting mechanism for assembling the units is installed at an installation portion provided in a ceiling portion of the transfer chamber.

4. An assembly method of a transfer mechanism which transfers one or more targets and includes a pick unit for holding the targets, a slide unit for sliding the pick unit and a drive unit for driving the slide unit, the assembly method comprising:

installing a lifting mechanism for lifting the units at a ceiling portion of a transfer chamber where the transfer mechanism is accommodated;

inserting a rail member on which a moving carriage moves, from an outside of the transfer chamber into an inside of the transfer chamber;

mounting the drive unit on the moving carriage;

moving the moving carriage on which the drive unit is mounted to a position above a drive unit installation portion in the transfer chamber;

lifting the drive unit by using the lifting mechanism and separating the drive unit from the moving carriage;

retreating the moving carriage from the drive unit installation portion, lowering the drive unit to the drive unit installation portion, and installing the drive unit to the drive unit installation portion;

mounting the slide unit on the moving carriage;

moving the moving carriage on which the slide unit is mounted to a position above a slide unit installation portion of the drive unit;

lifting the slide unit by using the lifting mechanism and separating the slide unit from the moving carriage;

retreating the moving carriage from the slide unit installation portion, lowering the slide unit to the slide unit installation portion, and installing the slide unit at the slide unit installation portion;

removing the lifting mechanism from the ceiling portion of the transfer chamber;

providing the pick unit with jack bolts for jacking up the pick unit;

mounting on the moving carriage the pick unit to which the jack bolts are provided;

moving the moving carriage to a position above a slide base provided at the slide unit;

jacking up the pick unit by using the jack bolts and separating the pick unit from the moving carriage;

retreating the moving carriage from the slide base, lowering the pick unit to the slide base, and installing the pick unit on the slide base;

removing the jack bolts from the pick unit; and

removing the rail member.

5. The assembly method of claim 4, wherein the rail member is inserted from the outside of the common transfer chamber into the inside of the common transfer chamber via a transfer port which is formed at the transfer chamber for transfer of the target.

6. The assembly method of claim 4, wherein the transfer chamber has an openable or detachable side plate, and the rail member is inserted from the outside of the transfer chamber into the inside of the transfer chamber via a space formed by opening the side plate or a space formed by detaching the side plate.

7. The assembly method of claim 4, wherein the transfer chamber is divided into blocks, and the rail member is inserted from the outside of the transfer chamber into the inside of the transfer chamber via an opening formed before coupling the blocks.

8. The assembly method of claim 4, wherein the rail member has a pair of rails and is inserted from the outside of the transfer chamber into the inside of the transfer chamber such that the drive unit installation portion is disposed between the pair of rails.

9. The assembly method of claim 4, wherein the pick unit has holding members which are arranged in multiple levels in a height direction to hold the respective targets.