WORKPIECE HANDLING SYSTEM

• US 20110027463A1
• Filed: 06/14/2010
• Published: 02/03/2011
• Est. Priority Date: 06/16/2009
• Status: Abandoned Application

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Daniels, Kevin M., Weaver, William T., Carlson, Charles T., Riordon, Benjamin B.
• Application Number:
  US12/814,748
• Publication Number:
  US 20110027463A1
• Time in Patent Office: Days
• US Class Current: 427/75
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01J 2237/2007 Holding mechanisms
• CPC Class Codes: H01J 2237/20292 Means for position and/or orientation registration
• CPC Class Codes: H01J 2237/204 Means for introducing and/or outputting objects
• CPC Class Codes: H01J 2237/31711 using mask
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
• CPC Class Codes: H01J 37/3171 for ion implantation
• CPC Class Codes: H01L 21/266 using masks H01L21/26586 takes precedence
• CPC Class Codes: H01L 21/67213 comprising at least one ion or electron beam chamber coating by ion implantation C23C; ion or electron beam tubes H01J37/00
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/022441 Electrode arrangements specially adapted for back-contact solar cells
• CPC Class Codes: H01L 31/068 the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
• CPC Class Codes: H01L 31/0682 back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A workpiece handling system includes a process chamber configured to support a workpiece for ion implantation, a first mask stored outside the process chamber in a mask station, and a robot system configured to retrieve the first mask from the mask station, and position the first mask upstream of the workpiece so the workpiece receives a first selective implant through the first mask. A method includes storing a first mask outside a process chamber in a mask station, retrieving the first mask from the mask station, positioning the first mask upstream of a workpiece positioned in the process chamber for ion implantation, and performing a first selective implant through the first mask.

Claims

1. A workpiece handling system comprising:

a process chamber configured to support a workpiece for ion implantation;

a first mask stored outside the process chamber in a mask station; and

a robot system configured to retrieve the first mask from the mask station, and position the first mask upstream of the workpiece so the workpiece receives a first selective implant through the first mask.

2. The workpiece handling system of claim 1, further comprising a load lock chamber, and wherein the mask station is positioned in the load lock chamber.

3. The workpiece handling system of claim 1, further comprising a clamping assembly positioned in the process chamber to support the workpiece for ion implantation, the clamping assembly comprising:

a clamp having a clamping surface to support the workpiece; and

two retractable lift pins extending from the clamping surface in an extended position, the two retractable lift pins defining a first plane to support the workpiece and a second plane to support the first mask in the extended position.

4. The workpiece handing system of claim 3, wherein the clamping assembly further comprises a post extending from the clamping surface of the clamp, the post sized to engage an associated aperture in the first mask to facilitate alignment of the first mask and the workpiece as the two retractable lift pins are retracted to a retracted position.

5. The workpiece handling system of claim 1, further comprising a second mask stored outside the process chamber in the mask station, and wherein the robot system is further configured to retrieve the second mask, position the second mask upstream of the workpiece so the workpiece receives a second selective implant through the second mask, wherein the first selective implant and the second selective implant together provide a desired aggregate selective implant pattern.

6. The workpiece handling system of claim 1, wherein the mask station comprises a plurality of non-thermally conductive pads to support the first mask when stored at the mask station.

7. The workpiece handling system of claim 1, wherein the mask station comprises a heater to heat the first mask when stored at the mask station.

8. The workpiece handling system of claim 1, wherein the mask station comprises a cooling unit to cool the first mask when stored at the mask station.

9. A method comprising:

storing a first mask outside a process chamber in a mask station;

retrieving the first mask from the mask station;

positioning the first mask upstream of a workpiece positioned in the process chamber for ion implantation; and

performing a first selective implant through the first mask.

10. The method of claim 9, further comprising returning the first mask to the mask station after performing the first selective implant.

11. The method of claim 9, further comprising:

storing a second mask in the mask station;

retrieving the second mask from the mask station;

positioning the second mask upstream of the workpiece positioned in the process chamber for ion implantation; and

performing a second selective implant through the second mask, wherein the fist selective implant and the second selective implant together provide a desired aggregate selective implant pattern.

12. The method of claim 11, wherein the first mask and the second mask are both positioned upstream of the workpiece simultaneously.

13. The method of claim 11, wherein the first mask and the second mask are positioned upstream of the workpiece in succession.

14. The method of claim 9, wherein the workpiece comprises a selective emitter solar cell and the first selective implant implants ions into elongated portions of the selective emitter solar cell to form heavily doped regions having a length and a width positioned beneath front side contacts of the selective emitter solar cell.

15. The method of claim 14, further comprising implanting the selective emitter solar cell with a blanket implant unimpeded by the first mask, the blanket implant providing a p-n junction in the selective emitter solar cell.

16. The method of claim 9, wherein the workpiece comprises an interdigitated back contact (IBC) solar sell, and the first selective implant implants ions into portions of the IBC solar cell to form back surface field region of an n-type dopant.

17. The method of claim 16, further comprising

retrieving a second mask from the mask station;

positioning the second mask upstream of the workpiece positioned in the process chamber for ion implantation; and

performing a second selective implant through the second mask to implant implants ions into other portions of the IBC solar cell to form an emitter region of a p-type dopant.

18. The method of claim 9, further comprising positioning the first mask on a plurality of non-thermally conductive pads in the mask station.

19. The method of claim 9, further comprising cooling the first mask in the mask station.