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MICROMACHINED INERTIAL SENSOR DEVICES

  • US 20110030473A1
  • Filed: 08/03/2010
  • Published: 02/10/2011
  • Est. Priority Date: 08/04/2009
  • Status: Active Grant
First Claim
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1. A sensor for measuring a motion thereof, comprising:

  • a frame;

    a first planar proof mass section attached to the frame by a first flexure; and

    a second planar proof mass section attached to the frame by a second flexure;

    wherein the frame, the first planar proof mass section, and the second planar proof mass section are formed in a micromachined layer and are adapted to measure angular rates about three axes and linear accelerations about the three axes.

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