Inertial Sensors with Reduced Sensitivity to Quadrature Errors and Micromachining Inaccuracies
First Claim
1. A MEMS gyroscope comprising:
- a first resonator configured for sensing rotation about a first axis (e.g., x axis) in a device plane, the first resonator including a first pair of shuttles suspended by a first plurality of suspension flexures and interconnected by a first fork, the first plurality of suspension flexures configured to allow the first pair of shuttles to be rotationally dithered in the device plane and to tilt out-of-plane about respective tilt axes (e.g., axes y1 and y2) perpendicular to the first axis;
a second resonator configured for sensing rotation about a second axis (e.g., y axis) normal to the first axis in the device plane, the second resonator including a second pair of shuttles suspended by a second plurality of suspension flexures and interconnected by a second fork, the second plurality of suspension flexures configured to allow the second pair of shuttles to be rotationally dithered in the device plane and to tilt out-of-plane about a tilt axis perpendicular to the second axis (e.g., axis x2);
a first set of Coriolis sensing electrodes underlying the first pair of shuttles and positioned along an axis (e.g., axis x1) parallel to the first axis to sense tilting of the first pair of shuttles about their respective tilt axes (e.g., axes y1 and y2); and
a second set of Coriolis sensing electrodes underlying the second pair of shuttles and positioned along the first resonator tilt axes (e.g., axes y1 and y2) to sense tilting of the second pair of shuttles about their tilt axis (e.g., axis x2).
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Accused Products
Abstract
Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies include a gyroscope incorporating two specially-configured single-axis gyroscopes for sensing rotations about two orthogonal axes (the axes of sensitivity) in the device plane, where each single-axis gyroscope includes a resonator having two rotationally-dithered shuttles interconnected by a fork and each shuttle is configured to tilt out-of-plane along a tilt axis perpendicular to the axis of sensitivity and includes corresponding Coriolis sensing electrodes positioned along an axis perpendicular to the tilt axis (i.e., parallel to the axis of sensitivity). The two single-axis gyroscopes may be interconnected, e.g., by one or more in-phase or anti-phase couplings interconnecting the forks and/or the shuttles.
50 Citations
27 Claims
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1. A MEMS gyroscope comprising:
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a first resonator configured for sensing rotation about a first axis (e.g., x axis) in a device plane, the first resonator including a first pair of shuttles suspended by a first plurality of suspension flexures and interconnected by a first fork, the first plurality of suspension flexures configured to allow the first pair of shuttles to be rotationally dithered in the device plane and to tilt out-of-plane about respective tilt axes (e.g., axes y1 and y2) perpendicular to the first axis; a second resonator configured for sensing rotation about a second axis (e.g., y axis) normal to the first axis in the device plane, the second resonator including a second pair of shuttles suspended by a second plurality of suspension flexures and interconnected by a second fork, the second plurality of suspension flexures configured to allow the second pair of shuttles to be rotationally dithered in the device plane and to tilt out-of-plane about a tilt axis perpendicular to the second axis (e.g., axis x2); a first set of Coriolis sensing electrodes underlying the first pair of shuttles and positioned along an axis (e.g., axis x1) parallel to the first axis to sense tilting of the first pair of shuttles about their respective tilt axes (e.g., axes y1 and y2); and a second set of Coriolis sensing electrodes underlying the second pair of shuttles and positioned along the first resonator tilt axes (e.g., axes y1 and y2) to sense tilting of the second pair of shuttles about their tilt axis (e.g., axis x2). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A MEMS gyroscope comprising:
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a resonator shuttle configured for sensing rotation about an axis of sensitivity in a device plane; and a set of suspension flexures configured to allow the shuttle to be rotationally dithered in the device plane and to tilt out-of-plane about a tilt axis perpendicular to the axis of sensitivity, wherein the suspension flexures include at least one elongated member and at least one shorter member, and wherein the suspension flexures are arranged such that the elongated members are parallel to the tilt axis. - View Dependent Claims (21)
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22. A MEMS gyroscope comprising:
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a first resonator configured for resonating in a device plane and sensing rotation about a first axis in the device plane; a second resonator configured for resonating in the device plane and sensing rotation about a second axis orthogonal to the first axis in the device plane; and at least one coupling interconnecting the first and second resonators, the at least one coupling configured to lock the resonance of the first and second resonators and to substantially prevent transfer of out-of-plane movements of each resonator to the other resonator. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification