Debonding and transfer techniques for hetero-epitaxially grown graphene, and products including the same
First Claim
1. A method of isolating a graphene thin film, the method comprising:
- hetero-epitaxially growing the graphene thin film on a catalyst thin film;
disposing a polymer-based coating on the graphene thin film on a surface thereof opposite the catalyst thin film;
curing the polymer-based coating; and
causing the graphene thin film and the polymer-based coating to be released from the catalyst thin film.
2 Assignments
0 Petitions
Accused Products
Abstract
Certain example embodiments of this invention relate to the use of graphene as a transparent conductive coating (TCC). In certain example embodiments, graphene thin films grown on large areas hetero-epitaxially, e.g., on a catalyst thin film, from a hydrocarbon gas (such as, for example, C2H2, CH4, or the like). The graphene thin films of certain example embodiments may be doped or undoped. In certain example embodiments, graphene thin films, once formed, may be lifted off of their carrier substrates and transferred to receiving substrates, e.g., for inclusion in an intermediate or final product. Graphene grown, lifted, and transferred in this way may exhibit low sheet resistances (e.g., less than 150 ohms/square and lower when doped) and high transmission values (e.g., at least in the visible and infrared spectra).
127 Citations
21 Claims
-
1. A method of isolating a graphene thin film, the method comprising:
-
hetero-epitaxially growing the graphene thin film on a catalyst thin film; disposing a polymer-based coating on the graphene thin film on a surface thereof opposite the catalyst thin film; curing the polymer-based coating; and causing the graphene thin film and the polymer-based coating to be released from the catalyst thin film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A method of disposing a graphene thin film on a target receiving substrate, the method comprising:
-
hetero-epitaxially growing the graphene thin film on a catalyst thin film; disposing a polymer-based coating on the graphene thin film on a surface thereof opposite the catalyst thin film; causing the graphene thin film and the polymer-based coating to be released from the catalyst thin film; disposing the graphene thin film and the polymer-based coating, directly or indirectly, on the target receiving substrate using contact pressure, the graphene thin film being closer to the target receiving substrate than the polymer-based coating; and removing the polymer-based layer by exposing it to a solvent and/or UV radiation. - View Dependent Claims (16)
-
-
17. A method of disposing a graphene thin film on a target receiving substrate, the method comprising:
-
hetero-epitaxially growing the graphene thin film on a metal catalyst thin film; disposing the graphene thin film and the catalyst thin film, directly or indirectly, on the target receiving substrate; and electrochemically anodizing the catalyst thin film below the graphene so as to render the catalyst thin film a substantially transparent metal oxide.
-
-
18. The method of claim 18, wherein during the electrochemical anodizing, the graphene thin film is caused to act as a cathode as the metal catalyst thin film is anodized.
-
19. A method of disposing a graphene thin film on a target receiving substrate, the method comprising:
-
hetero-epitaxially growing the graphene thin film on a catalyst thin film; applying an adhesive to the graphene thin film on a surface thereof opposite the catalyst thin film; causing the graphene thin film to be released from the catalyst thin film; and adhering the graphene thin film to the target receiving substrate. - View Dependent Claims (20, 21)
-
Specification