SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

• US 20110031498A1
• Filed: 08/05/2010
• Published: 02/10/2011
• Est. Priority Date: 08/07/2009
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Kayama, Masayo, Kimura, Hajime, Ohara, Hiroki
• Granted Patent: US 8,324,626 B2
• Time in Patent Office: Days
• US Class Current: 257/59
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1259 Multistep manufacturing methods
• CPC Class Codes: H01L 29/45 Ohmic electrodes
• CPC Class Codes: H01L 29/4908 for thin film semiconductor, e.g. gate of TFT
• CPC Class Codes: H01L 29/66742 Thin film unipolar transistors
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A semiconductor device includes a pixel portion having a first thin film transistor and a driver circuit having a second thin film transistor. Each of the first thin film transistor and the second thin film transistor includes a gate electrode layer, a gate insulating layer, a semiconductor layer, a source electrode layer, and a drain electrode layer. Each of the layers of the first thin film transistor has a light-transmitting property. Materials of the gate electrode layer, the source electrode layer and the drain electrode layer of the first thin film transistor are different from those of the second transistor, and each of the resistances of the second thin film transistor is lower than that of the first thin film transistor.

Claims

1. A semiconductor device comprising:

a pixel portion including a first thin film transistor over a substrate; and

a driver circuit portion including a second thin film transistor over the substrate,

the first thin film transistor comprising;

a first gate electrode layer;

a first gate insulating layer over the first gate electrode layer;

a first semiconductor layer over the first gate insulating layer; and

a first source electrode layer and a first drain electrode layer over the first semiconductor layer,

the second thin film transistor comprising;

a second gate electrode layer;

a second gate insulating layer over the second gate electrode layer;

a second semiconductor layer over the second gate insulating layer; and

a second source electrode layer and a second drain electrode layer over the second semiconductor layer,

wherein each of the first gate electrode layer, the first gate insulating layer, the first semiconductor layer, the first source electrode layer, and the first drain electrode layer has a light-transmitting property,

wherein a material of the first gate electrode layer is different from a material of the second gate electrode layer,

wherein resistance of the second gate electrode layer is lower than that of the first gate electrode layer,

wherein a material of the first source electrode layer and the first drain electrode layer is different from a material of the second source electrode layer and the second drain electrode layer, and

wherein resistance of the second source electrode layer and the second drain electrode layer is lower than that of the first source electrode layer and the first drain electrode layer.

2. The semiconductor device according to claim 1, wherein the second source electrode layer and the second drain electrode layer contain a metal material.

3. The semiconductor device according to claim 1, further comprising a capacitor portion over the substrate,

wherein the capacitor portion includes a capacitor wiring and a capacitor electrode overlapping with the capacitor wiring, and

wherein each of the capacitor wiring and the capacitor electrode has a light-transmitting property.

4. The semiconductor device according to claim 1,

wherein the semiconductor device further includes an insulating layer over the second semiconductor layer, and

wherein a conductive layer which is provided over the insulating layer and overlaps with the second semiconductor layer.

5. The semiconductor device according to claim 4,

wherein a material of the conductive layer is different from the material of the first gate electrode layer, and

wherein resistance of the conductive layer is lower than that of the first gate electrode layer.

6. The semiconductor device according to claim 1, wherein resistance of a first region in the second semiconductor layer overlapping with the second source electrode layer and the second drain electrode layer is lower than that of a second region of the second semiconductor layer which is other than the first region.

7. A semiconductor device comprising:

a pixel portion including a first thin film transistor over a substrate; and

a driver circuit portion including a second thin film transistor over the substrate,

the first thin film transistor comprising;

a first gate electrode layer;

a first gate insulating layer over the first gate electrode layer;

a first semiconductor layer over the first gate insulating layer; and

a first source electrode layer and a first drain electrode layer over the first semiconductor layer,

the second thin film transistor comprising;

a second gate electrode layer;

a second gate insulating layer over the second gate electrode layer;

a second semiconductor layer over the second gate insulating layer; and

a second source electrode layer and a second drain electrode layer over the second semiconductor layer,

wherein each of the first gate electrode layer, the first gate insulating layer, the first semiconductor layer, the first source electrode layer, and the first drain electrode layer has a light-transmitting property,

wherein a material of the first gate electrode layer is different from a material of the second gate electrode layer,

wherein resistance of the second gate electrode layer is lower than that of the first gate electrode layer,

wherein a material of the first source electrode layer and the first drain electrode layer is different from a material of the second source electrode layer and the second drain electrode layer,

wherein resistance of the second source electrode layer and the second drain electrode layer is lower than that of the first source electrode layer and the first drain electrode layer, and

wherein the first semiconductor layer includes an oxide semiconductor.

8. The semiconductor device according to claim 7, wherein the second source electrode layer and the second drain electrode layer contain a metal material.

9. The semiconductor device according to claim 7, further comprising a capacitor portion over the substrate,

wherein the capacitor portion includes a capacitor wiring and a capacitor electrode overlapping with the capacitor wiring, and

wherein each of the capacitor wiring and the capacitor electrode has a light-transmitting property.

10. The semiconductor device according to claim 7,

wherein the semiconductor device further includes an insulating layer over the second semiconductor layer, and

wherein a conductive layer which is provided over the insulating layer and overlaps with the second semiconductor layer.

11. The semiconductor device according to claim 10,

wherein a material of the conductive layer is different from the material of the first gate electrode layer, and

wherein resistance of the conductive layer is lower than that of the first gate electrode layer.

12. The semiconductor device according to claim 7, wherein resistance of a first region in the second semiconductor layer overlapping with the second source electrode layer and the second drain electrode layer is lower than that of a second region of the second semiconductor layer which is other than the first region.

13. A semiconductor device comprising:

a pixel portion including a first thin film transistor over a substrate; and

a driver circuit portion including a second thin film transistor over the substrate,

the first thin film transistor comprising;

a first gate electrode layer;

a first gate insulating layer over the first gate electrode layer;

a first semiconductor layer over the first gate insulating layer; and

a first source electrode layer and a first drain electrode layer over the first semiconductor layer,

the second thin film transistor comprising;

a second gate electrode layer;

a second gate insulating layer over the second gate electrode layer;

a second semiconductor layer over the second gate insulating layer; and

a second source electrode layer and a second drain electrode layer over the second semiconductor layer,

wherein each of the first gate electrode layer, the first gate insulating layer, the first semiconductor layer, the first source electrode layer, and the first drain electrode layer has a light-transmitting property,

wherein a material of the first gate electrode layer is different from a material of the second gate electrode layer,

wherein resistance of the second gate electrode layer is lower than that of the first gate electrode layer,

wherein a material of the first source electrode layer and the first drain electrode layer is different from a material of the second source electrode layer and the second drain electrode layer,

wherein resistance of the second source electrode layer and the second drain electrode layer is lower than that of the first source electrode layer and the first drain electrode layer, and

wherein the second semiconductor layer includes an oxide semiconductor.

14. The semiconductor device according to claim 13, wherein the second source electrode layer and the second drain electrode layer contain a metal material.

15. The semiconductor device according to claim 13, further comprising a capacitor portion over the substrate,

wherein the capacitor portion includes a capacitor wiring and a capacitor electrode overlapping with the capacitor wiring, and

wherein each of the capacitor wiring and the capacitor electrode has a light-transmitting property.

16. The semiconductor device according to claim 13,

wherein the semiconductor device further includes an insulating layer over the second semiconductor layer, and

wherein a conductive layer which is provided over the insulating layer and overlaps with the second semiconductor layer.

17. The semiconductor device according to claim 16,

wherein a material of the conductive layer is different from the material of the first gate electrode layer, and

wherein resistance of the conductive layer is lower than that of the first gate electrode layer.

18. The semiconductor device according to claim 13, wherein resistance of a first region in the second semiconductor layer overlapping with the second source electrode layer and the second drain electrode layer is lower than that of a second region of the second semiconductor layer which is other than the first region.

19. A method for manufacturing a semiconductor device comprising a pixel portion including a first thin film transistor and a driver circuit portion including a second thin film transistor, comprising the steps of:

forming a first light-transmitting conductive film over a substrate;

forming a second conductive film over the first light-transmitting conductive film, wherein resistance of the second conductive film is lower than that of the first light-transmitting conductive film;

forming a first resist mask including a first region and a second region whose thickness is smaller than that of the first region over the second conductive film;

etching with the use of the first resist mask so that the second conductive film and part of the first light-transmitting conductive film in the pixel portion, and part of the second conductive film and part of the first light-transmitting conductive film in the driver circuit portion are removed, thereby forming a first gate electrode layer of the first thin film transistor and a second gate electrode layer of the second thin film transistor;

forming a first gate insulating film over the first gate electrode layer and a second gate insulating film over the second gate electrode layer;

forming a first semiconductor layer over the first gate insulating film and a second semiconductor layer over the second gate insulating film;

forming a third light-transmitting conductive film over the first semiconductor layer and the second semiconductor layer;

forming a fourth conductive film over the third light-transmitting conductive film, wherein resistance of the fourth conductive film is lower than that of the third light-transmitting conductive film;

forming a second resist mask including a third region and a fourth region whose thickness is smaller than that of the third region over the fourth conductive film; and

etching with the use of the second resist mask so that part of the third light-transmitting conductive film and the fourth conductive film and in the pixel portion, and part of the fourth conductive film and part of the third light-transmitting conductive film in the driver circuit portion are removed, thereby forming a first source electrode layer and a first drain electrode layer over the first gate insulating film, and a second source electrode layer and a second drain electrode layer over the second gate insulating film.

20. The method for manufacturing a semiconductor device according to claim 19, wherein the first resist mask and the second resist mask are formed using a multi-tone mask.

21. The method for manufacturing a semiconductor device, according to claim 19, further comprising the steps of:

forming an insulating layer over the first source electrode layer, the first drain electrode layer, the second source electrode layer and the second drain electrode layer;

forming a fifth light-transmitting conductive film over the insulating layer;

forming a sixth conductive film over the fifth light-transmitting conductive film, wherein resistance of the sixth conductive film is lower than that of the fifth light-transmitting conductive film;

forming a third resist mask including a fifth region and a sixth region whose thickness is smaller than that of the fifth region over the sixth conductive film; and

etching with the use of the third resist mask so that the sixth conductive film and part of the fifth light-transmitting conductive film in the pixel portion, and part of the fifth light-transmitting conductive film and part of the sixth conductive film in the driver circuit portion are removed thereby forming a first conductive layer overlapping with a first channel formation region of the first thin film transistor and a second conductive layer overlapping with a second channel formation region of the second thin film transistor.

22. The method for manufacturing a semiconductor device, according to claim 21, wherein the third resist mask is formed using a multi-tone mask.