ELECTROCHEMICAL SENSOR
First Claim
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1. An electrochemical sensor device comprising:
- a sensor chip having an integrated electrochemical sensor element; and
a substrate having a first surface on which the sensor chip is mounted, the substrate comprising a reference electrode structure for the integrated electrochemical sensor element, the reference electrode structure connected to the sensor chip via an electrical connection on the first surface of the substrate.
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Abstract
An electrochemical sensor device including a sensor chip having an integrated electrochemical sensor element; and a substrate having a first surface on which the sensor chip is mounted, the substrate comprising a reference electrode structure for the integrated electrochemical sensor element, the reference electrode structure connected to the sensor chip via an electrical connection on the first surface of the substrate.
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Citations
15 Claims
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1. An electrochemical sensor device comprising:
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a sensor chip having an integrated electrochemical sensor element; and a substrate having a first surface on which the sensor chip is mounted, the substrate comprising a reference electrode structure for the integrated electrochemical sensor element, the reference electrode structure connected to the sensor chip via an electrical connection on the first surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing an electrochemical sensor device, the method comprising:
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providing a substrate having a first surface and a second opposing surface; applying electrical connections to the first surface of the substrate; forming a reference electrode structure in the substrate; and connecting a sensor chip having an integrated electrochemical sensor element to the first surface, electrically connecting the sensor element to the reference electrode structure via the electrical connection. - View Dependent Claims (11, 12, 13, 14, 15)
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Specification