PLASMA ENHANCED POLYMER ULTRA-THIN MULTI-LAYER PACKAGING
First Claim
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1. An implantable medical device comprising:
- a plurality of components on a substrate; and
a biocompatible multi-layer polymeric coating applied by vapour deposition to conform to and sealingly cover at least the first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.
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Abstract
An implantable medical device including a plurality of components on a substrate, and a biocompatible multi-layer polymeric coating applied by vapour deposition to conform to and sealingly cover at least a portion of the components and/or the substrate. The coating is applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.
68 Citations
11 Claims
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1. An implantable medical device comprising:
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a plurality of components on a substrate; and a biocompatible multi-layer polymeric coating applied by vapour deposition to conform to and sealingly cover at least the first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An implantable medical device comprising:
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a plurality of components on a substrate having at least a first three-dimensional portion; and a biocompatible multi-layer polymeric coating applied by vapour deposition to conform to and sealingly cover at least the first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor, wherein diffusion through each layer differs from that of the other layer in the pair, and the precursor for at least one pair is selected from di-p-xylylene and halogenated derivatives thereof. - View Dependent Claims (10, 11)
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Specification