SUBSTRATE PROCESSING APPARATUS
First Claim
1. A substrate processing apparatus comprising:
- a transport chamber capable of holding a sealed atmosphere sealed off from atmosphere exterior to the transport chamber;
at least one substrate holding module for holding a substrate, the at least one holding module being communicably connected to the transport chamber for allowing transfer of the substrate between the at least one holding module and transport chamber;
a transport vehicle movably mounted in the transport chamber, the vehicle having a base and a substrate transfer arm that is movably jointed and movably mounted to the base; and
another module capable of holding the substrate and communicably connected to the transport chamber for transferring the substrate therebetween,wherein the transport chamber defines a linear travel slot for the vehicle, the at least one holding module being located on one side of the slot, and the arm having articulation for moving a substrate to opposite sides of the slot allowing the other module to be selectably connected to the transport chamber on either side of the slot, wherein the transport vehicle can effect transfer of the substrate between the transport chamber and both the at least one holding module and the other module.
7 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor workpiece processing apparatus having a first chamber, a transport vehicle, and another chamber. The first chamber is capable of being isolated from an outside atmosphere. The transport vehicle is located in the first chamber and is movably supported from the first chamber for moving linearly relative to the first chamber. The transport vehicle includes a base, and an integral semiconductor workpiece transfer arm movably mounted to the base and capable of multi-access movement relative to the base. The other chamber is communicably connected to the first chamber via a closable opening of the first chamber. The opening is sized to allow the transport vehicle to transit between the first chamber and the other chamber through the opening.
156 Citations
38 Claims
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1. A substrate processing apparatus comprising:
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a transport chamber capable of holding a sealed atmosphere sealed off from atmosphere exterior to the transport chamber; at least one substrate holding module for holding a substrate, the at least one holding module being communicably connected to the transport chamber for allowing transfer of the substrate between the at least one holding module and transport chamber; a transport vehicle movably mounted in the transport chamber, the vehicle having a base and a substrate transfer arm that is movably jointed and movably mounted to the base; and another module capable of holding the substrate and communicably connected to the transport chamber for transferring the substrate therebetween, wherein the transport chamber defines a linear travel slot for the vehicle, the at least one holding module being located on one side of the slot, and the arm having articulation for moving a substrate to opposite sides of the slot allowing the other module to be selectably connected to the transport chamber on either side of the slot, wherein the transport vehicle can effect transfer of the substrate between the transport chamber and both the at least one holding module and the other module. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A substrate processing apparatus comprising:
a transport chamber capable of having a controlled atmosphere therein; at least one substrate holding module for holding a substrate therein, the at least one substrate holding module being communicably connected to the transport chamber for allowing transfer of the substrate between the at least one holding module and transport chamber; and a substrate transport vehicle movably mounted in, and interfacing with the transport chamber, and having a chuck capable of holding the substrate on the vehicle, wherein the transport chamber defines a tube with a section having substantially straight opposing walls and having linear travel paths extending between the opposing walls of the section, along which the transport vehicle is capable of moving in the chamber, at least one of the linear travel paths in the section being oriented at an angle relative to another of the linear travel paths in the section. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A substrate processing apparatus comprising:
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a transport chamber capable of having a controlled atmosphere therein; at least one substrate holding module for holding a substrate, the at least one holding module being communicably connected to the transport chamber via a substrate transfer opening, in a side wall of the transport chamber, adapted for allowing transfer of the substrate between the transport chamber and the at least one holding module; a first transport vehicle movably mounted in the transport chamber for transporting the substrate therein; and a second transport vehicle movably mounted in the transport chamber for transporting the substrate therein; wherein the transport chamber has several linear travel paths for the first and second vehicles to travel in the transport chamber, the linear travel paths being disposed between adjacent opposing walls of the transport chamber, the adjacent opposing walls defining a transport chamber width sized to admit but one of the first or second transport vehicles within the transport chamber width, and wherein the first and second vehicles are capable of moving past one another when the first vehicle is using one of the travel paths and the second vehicle is using another of the travel paths. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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29. A substrate processing apparatus comprising:
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a transport chamber capable of being sealed from an outside atmosphere; a substrate holding module for holding a substrate therein, the holding module being communicably connected to the transport chamber via a substrate transfer opening, in a side wall of the transport chamber, adapted for allowing transfer of the substrate between the transport chamber and the holding module; a transport vehicle movably mounted in and interfacing with the transport chamber and capable of holding the substrate, the transport chamber defining at least one linear transport path along which the transport vehicle is capable of moving in the transport chamber; wherein the transport chamber comprises several connectable chamber modules, each chamber module being capable of admitting entry of the transport vehicle exiting from an adjoining chamber module, and of being selectably connectable to at least another chamber module to provide a selectably variable configuration to the transport chamber, and wherein at least one chamber module, from the chamber modules forming the transport chamber, is capable of being sealed from an atmosphere in another of the chamber modules forming the transport chamber. - View Dependent Claims (30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification