Offset Detection and Compensation for Micromachined Inertial Sensors
First Claim
1. In an inertial sensor having a resonator and an accelerometer, a method of detecting at least one error source relating to a drive signal applied to the resonator, the method comprising:
- providing a modulated drive signal to the resonator; and
sensing accelerometer signals induced by the modulated drive signal to detect the at least one error source.
1 Assignment
0 Petitions
Accused Products
Abstract
Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.
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Citations
34 Claims
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1. In an inertial sensor having a resonator and an accelerometer, a method of detecting at least one error source relating to a drive signal applied to the resonator, the method comprising:
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providing a modulated drive signal to the resonator; and sensing accelerometer signals induced by the modulated drive signal to detect the at least one error source. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An inertial sensor comprising:
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a resonator; an accelerometer; a resonator driver configured to provide a modulated drive signal to the resonator; and an offset detector configured to sense accelerometer signals induced by the modulated drive signal to detect at least one error source relating to the drive signal applied to the resonator. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A controller for detecting at least one error source relating to a drive signal applied to a resonator of an inertial sensor including the resonator and an accelerometer, the controller comprising:
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a resonator driver configured to provide a modulated drive signal to the resonator; and an offset detector configured to sense accelerometer signals induced by the modulated drive signal to detect at least one error source relating to the drive signal applied to the resonator. - View Dependent Claims (22)
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23. In an inertial sensor having a resonator and an accelerometer, the resonator supported by an underlying substrate, a method of detecting at least one error source relating to aerodynamics of the resonator, the method comprising:
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providing a drive signal to cause resonance of the resonator; providing a modulated test signal to modulate the distance between the resonator and the underlying substrate; and sensing accelerometer signals induced by the modulated test signal to detect the at least one error source. - View Dependent Claims (24, 25, 26, 27)
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28. An inertial sensor comprising:
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a resonator supported by a substrate; an accelerometer; a resonator driver configured to provide a drive signal to the resonator to cause resonance of the resonator; a test signal generator configured to provide a modulated test signal to modulate the distance between the resonator and the substrate; and a detector configured to sense accelerometer signals induced by the modulated test signal to detect at least one error source relating to aerodynamics of the resonator. - View Dependent Claims (29, 30, 31, 32)
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33. A controller for detecting at least one error source relating to aerodynamics of a resonator of an inertial sensor including the resonator and an accelerometer, the resonator supported by a substrate, the controller comprising:
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a resonator driver configured to provide a drive signal to the resonator to cause resonance of the resonator; a test signal generator configured to provide a modulated test signal to modulate the distance between the resonator and the underlying substrate; and a detector configured to sense accelerometer signals induced by the modulated test signal to detect at least one error source relating to aerodynamics of the resonator. - View Dependent Claims (34)
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Specification