DIRECT WAFER-BONDED THROUGH-HOLE PHOTODIODE
First Claim
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1. A photodetector array comprising a plurality of photodetectors formed of:
- (a) a high resistivity low doping concentration first semiconductor substrate; and
(b) a low resistivity high doping concentration second semiconductor substrate, wherein the first and second semiconductor substrates are directly bonded together with a silicon-to-silicon atomic bond at a bond interface, thereby providing a sharp transition from the first substrate to the second substrate.
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Abstract
A photodetector array comprises a plurality of photodetectors formed by a high resistivity low doping concentration first semiconductor substrate and a low resistivity high doping concentration second semiconductor substrate. The first and second semiconductor substrates are directly bonded together with a silicon-to-silicon atomic bond at a bond interface, thereby providing a sharp transition from the first substrate to the second substrate. A method of making the photodetector array is also provided.
28 Citations
19 Claims
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1. A photodetector array comprising a plurality of photodetectors formed of:
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(a) a high resistivity low doping concentration first semiconductor substrate; and (b) a low resistivity high doping concentration second semiconductor substrate, wherein the first and second semiconductor substrates are directly bonded together with a silicon-to-silicon atomic bond at a bond interface, thereby providing a sharp transition from the first substrate to the second substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A radiation detector comprising:
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(a) a scintillator layer that converts X-ray radiation to visible light; and (b) a photodiode array that converts the visible light to an electrical signal, the photodiode array including a plurality of photodetectors formed of; (i) a high resistivity low doping concentration first semiconductor substrate; and (ii) a low resistivity high doping concentration second semiconductor substrate, wherein the first and second semiconductor substrates are directly bonded together with a silicon-to-silicon atomic bond at a bond interface, thereby providing a sharp transition from the first substrate to the second substrate. - View Dependent Claims (10)
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11. An X-ray CT scanner comprising:
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(a) a scintillator layer that converts X-ray radiation to visible light; and (b) a photodiode array that converts the visible light to an electrical signal, the photodiode array including a plurality of photodetectors formed of; (i) a high resistivity low doping concentration first semiconductor substrate; and (ii) a low resistivity high doping concentration second semiconductor substrate, wherein the first and second semiconductor substrates are directly bonded together with a silicon-to-silicon atomic bond at a bond interface, thereby providing a sharp transition from the first substrate to the second substrate. - View Dependent Claims (12)
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13. A method of making a plurality of photodetectors comprises:
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(a) providing a high resistivity low doping concentration first semiconductor substrate; (b) providing a low resistivity high doping concentration second semiconductor substrate; and (c) bonding the first and second substrates together to form a single structure, wherein a silicon-to-silicon atomic bond is formed at a bond interface, thereby providing a sharp transition from the first substrate to the second substrate. - View Dependent Claims (14, 15)
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16. A photodetector array comprising a plurality of photodetectors having double-sided electrodes, the plurality of photodetectors comprising:
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(a) a semiconductor substrate having a top and bottom surface; (b) a first electrode on the top surface of the substrate; (c) a second electrode on the bottom surface of the substrate; (d) a plurality of electrically isolated through silicon vias that longitudinally traverse the substrate from the top surface of the substrate to the bottom surface of the substrate, the vias including continuous electrical connections therethrough, wherein the top of each via is electrically connected to the first electrode, and the bottom of each via is electrically connected to the second electrode, thereby providing the plurality of photodetectors with double-sided electrodes. - View Dependent Claims (17, 18, 19)
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Specification