MULTI-CHIP MODULE AND METHOD OF MANUFACTURING THE SAME

• US 20110042824A1
• Filed: 08/17/2010
• Published: 02/24/2011
• Est. Priority Date: 08/20/2009
• Status: Active Grant

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: KOIDE, Masateru
• Granted Patent: US 8,368,230 B2
• Time in Patent Office: Days
• US Class Current: 257/774
• CPC Class Codes: H01L 21/76898 formed through a semiconductor substrate
• CPC Class Codes: H01L 2224/0401 Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
• CPC Class Codes: H01L 2224/05552 in top view
• CPC Class Codes: H01L 2224/0557 the external layer being disposed on a via connection of the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/13025 the bump connector being disposed on a via connection of the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/13099 Material
• CPC Class Codes: H01L 2224/131 with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
• CPC Class Codes: H01L 2224/1403 Bump connectors having different sizes, e.g. different diameters, heights or widths
• CPC Class Codes: H01L 2224/14181 On opposite sides of the body
• CPC Class Codes: H01L 2224/16 of an individual bump connector
• CPC Class Codes: H01L 2224/16235 the bump connector connecting to a via metallisation of the item
• CPC Class Codes: H01L 2224/17181 On opposite sides of the body
• CPC Class Codes: H01L 2224/274 by blanket deposition of the material of the layer connector
• CPC Class Codes: H01L 2224/73204 the bump connector being embedded into the layer connector
• CPC Class Codes: H01L 2224/73253 Bump and layer connectors
• CPC Class Codes: H01L 2224/81191 wherein the bump connectors are disposed only on the semiconductor or solid-state body
• CPC Class Codes: H01L 2224/81194 Lateral distribution of the bump connectors
• CPC Class Codes: H01L 2224/81801 Soldering or alloying
• CPC Class Codes: H01L 23/147 Semiconductor insulating substrates semiconductor conductive substrates H01L23/4926
• CPC Class Codes: H01L 23/481 Internal lead connections, e.g. via connections, feedthrough structures
• CPC Class Codes: H01L 23/49822 : Multilayer substrates multilayer metallisation on monolayer substrate H01L23/498
• CPC Class Codes: H01L 23/49827 : Via connections through the substrates, e.g. pins going through the substrate, coaxial cables H01L23/49822, H01L23/49833, H01L23/4985, H01L23/49861 take precedence
• CPC Class Codes: H01L 23/49838 : Geometry or layout
• CPC Class Codes: H01L 24/13 : of an individual bump connector
• CPC Class Codes: H01L 24/14 : of a plurality of bump connectors
• CPC Class Codes: H01L 24/81 : using a bump connector
• CPC Class Codes: H01L 24/95 : at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
• CPC Class Codes: H01L 25/0655 : the devices being arranged next to each other
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 : Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/01005 : Boron [B]
• CPC Class Codes: H01L 2924/01006 : Carbon [C]
• CPC Class Codes: H01L 2924/01029 : Copper [Cu]
• CPC Class Codes: H01L 2924/01033 : Arsenic [As]
• CPC Class Codes: H01L 2924/01074 : Tungsten [W]
• CPC Class Codes: H01L 2924/01078 : Platinum [Pt]
• CPC Class Codes: H01L 2924/014 : Solder alloys
• CPC Class Codes: H01L 2924/10253 : Silicon [Si]
• CPC Class Codes: H01L 2924/15151 : the die mounting substrate comprising an aperture, e.g. for underfilling, outgassing, window type wire connections
• CPC Class Codes: H01L 2924/15311 : being a ball array, e.g. BGA

Abstract

A multi-chip module includes a package board, a plurality of chips, and a wiring board. The plurality of chips are horizontally disposed on the package board. The plurality of chips are electrically connected with the package board, and respectively provided with via holes which penetrate through the plurality of chips. The plurality of chips are respectively provided with circuits at surfaces facing the package board. The wiring board is disposed on an opposite side to the package board across the plurality of chips. The wiring board includes a wiring pattern which is electrically connecting adjacent chips one another. The circuit is electrically connected to the wiring pattern through the via holes.

Claims

1. A multi-chip module comprising:

a package board;

a plurality of chips horizontally disposed on the package board, electrically connected with the package board, respectively provided with via holes penetrating through the plurality of chips, and respectively provided with circuits at surfaces facing the package board; and

a wiring board disposed on an opposite side to the package board across the plurality of chips, and including a wiring pattern electrically connecting adjacent chips one another,

wherein the circuit is electrically connected to the wiring pattern through the via holes.

2. The multi-chip module of claim 1, wherein the wiring pattern is formed by a semiconductor manufacture equipment.

3. The multi-chip module of claim 1, wherein at least one of the plurality of chips has a different thickness as compared to other chips.

4. The multi-chip module of claim 1, wherein the wiring board includes:

a silicon substrate; and

an insulating layer disposed on the silicon substrate, and the wiring pattern is formed in the insulating layer.

5. A method of manufacturing a multi-chip module comprising:

disposing a plurality of chips horizontally on a package board, each of the plurality of chips including a circuit facing the package board;

polishing opposite surfaces of the plurality of chips with respect to the circuit to level the opposite surfaces of the plurality of chips;

mounting a wiring board on polished surfaces of the plurality of chips; and

electrically connecting the chips to one another with a wiring pattern provided in the wiring board.