MEASURING APPARATUS

• US 20110043808A1
• Filed: 08/17/2010
• Published: 02/24/2011
• Est. Priority Date: 08/18/2009
• Status: Abandoned Application

• Current Assignee: Nidec-Read Corporation (Nidec Corporation)
• Original Assignee: Nidec-Read Corporation (Nidec Corporation)
• Inventors: ISOZAKI, Hisashi, Enomoto, Yoshiyuki
• Application Number:
  US12/857,879
• Publication Number:
  US 20110043808A1
• Time in Patent Office: Days
• US Class Current: 356/445
• CPC Class Codes: G01B 11/0608 Height gauges
• CPC Class Codes: G01B 11/25 by projecting a pattern, e.g. one or more lines, moiré fringes on the object G01B11/255 takes precedence ; image analysis for depth or shape recovery G06T7/50
• CPC Class Codes: G01N 21/951 Balls
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10

Abstract

A measuring apparatus for measuring a surface shape of a target, includes a projection system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, a plurality of imaging systems each configured to cause the reflected line beam to form an image on a receiving surface of the imaging device so that a shape of the line beam on the target is acquired and a splitting mechanism to split the reflected line beam and guide the split reflected line beam to the imaging device. The imaging systems have different optical settings for the object in the target, a plurality of segments are set on the receiving surface while each of the segments in each of which at least one region is set as a reception region is partitioned into a plurality of regions, and the imaging system causes the reflected line beams split by the splitting mechanism to form images on the reception regions in the different segments, respectively.

Claims

1. A measuring apparatus comprising:

a projection optical system configured to radiate a line beam on a measurement target; and

an imaging device configured to acquire a reflected line beam reflected from the measurement target, the measuring apparatus measuring a surface shape of the measurement target on the basis of a geometric positional relationship in the reflected line beam on the measurement target, the reflected line beam being acquired by the imaging device;

the measuring apparatus further comprising

a plurality of optical imaging systems each provided between the measurement target and the imaging device, and each configured to cause the reflected line beam to form an image on a receiving surface of the imaging device so that a shape of the line beam on the measurement target is acquired; and

a beam splitting mechanism provided between the measurement target and each of the plurality of optical imaging systems, and configured to split the reflected line beam and guide the split reflected line beam to the imaging device, wherein

the optical imaging systems have different optical settings for the object in the measurement target from each other;

a plurality of segments are set on the receiving surface of the imaging device while each of the segments is partitioned into a plurality of regions, and at least one region in each of the segments is set as a reception region; and

the optical imaging system causes the reflected line beams split by the beam splitting mechanism to form images on the reception regions in the different segments, respectively, on the receiving surface of the imaging device.

2. The measuring apparatus according to claim 1, wherein the reception region is a region for which output processing is firstly performed in each of the segments on the receiving surface of the imaging device.

3. The measuring apparatus according to claim 1, wherein the optical setting for the object for measurement in the measurement target in each of the plurality of optical imaging systems is a measurable range in a height direction in the measurement target.

4. The measuring apparatus according to claim 2, wherein the optical setting for the object for measurement in the measurement target in each of the plurality of optical imaging systems is a measurable range in a height direction in the measurement target.

5. The measuring apparatus according to claim 1, wherein the optical setting for the object for measurement in the measurement target in each of the plurality of optical imaging systems is a range to be measured in an extending direction of the line beam on the measurement target.

6. The measuring apparatus according to claim 2, wherein the optical setting for the object for measurement in the measurement target in each of the plurality of optical imaging systems is a range to be measured in an extending direction of the line beam on the measurement target.

7. The measuring apparatus according to claim 1, wherein the optical setting for the object for measurement in the measurement target in each of the plurality of optical imaging systems is a combination of a measurable range in a height direction on the measurement target and a range to be measured in an extending direction of the line beam in the measurement target.

8. The measuring apparatus according to claim 2, wherein the optical setting for the object for measurement in the measurement target in each of the plurality of optical imaging systems is a combination of a measurable range in a height direction on the measurement target and a range to be measured in an extending direction of the line beam in the measurement target.

9. The measuring apparatus according to claim 1, wherein the projection optical system forms the line beam having a single wavelength;

and

the beam splitting mechanism splits the reflected line beam having the single wavelength according to a number of the plurality of optical imaging systems.

10. The measuring apparatus according to claim 1, wherein the projection optical system forms the line beam including a plurality of beams having wavelengths different from each other;

and

the beam splitting mechanism splits the reflected line beam including the plurality of beams having the wavelengths different from each other according to a number of the plurality of optical imaging systems.

11. The measuring apparatus according to claim 1, further comprising:

an entering beam controlling mechanism provided between the optical imaging system and the imaging device, and configured to cause only the reflected line beam from the optical imaging system corresponding to each of the reception regions to enter the imaging device.

12. The measuring apparatus according to claim 11, wherein the projection optical system forms the line beam having a single wavelength;

and

the entering beam controlling mechanism is a light shielding member configured to partition the receiving surface according to each of the reception regions.

13. The measuring apparatus according to claim 11, wherein the projection optical system forms the line beam having a single wavelength;

and

the entering beam controlling mechanism is a guiding device configured to guide beams to the reception regions, respectively.

14. The measuring apparatus according to claim 11, wherein the projection optical system forms the line beam including a plurality of beams having different wavelengths from each other;

and

the entering beam controlling mechanism is a filter configured to transmit only beams within a predetermined wavelength range of the plurality of beams having different wavelengths from each other.

15. A measuring apparatus comprising:

a projection optical system configured to radiate a line beam on a measurement target; and

a reception optical system including an imaging device configured to acquire a reflected line beam reflected from the measurement target, the measuring apparatus measuring a surface shape of the measurement target on the basis of a geometric positional relationship in the reflected line beam on the measurement target, the reflected line beam being acquired by the imaging device, wherein

the imaging device has a receiving surface in which a plurality of segments are set; and

the reception optical system splits the reflected line beam and causes the split reflected line beams to form images on the different segments in the receiving surface of the imaging device so as to acquire a shape of the line beam on the measurement target.