MEASURING APPARATUS
First Claim
1. A measuring apparatus comprising:
- a projection optical system configured to radiate a line beam on a measurement target; and
an imaging device configured to acquire a reflected line beam reflected from the measurement target, the measuring apparatus measuring a surface shape of the measurement target on the basis of a geometric positional relationship in the reflected line beam on the measurement target, the reflected line beam being acquired by the imaging device;
the measuring apparatus further comprisinga plurality of optical imaging systems each provided between the measurement target and the imaging device, and each configured to cause the reflected line beam to form an image on a receiving surface of the imaging device so that a shape of the line beam on the measurement target is acquired; and
a beam splitting mechanism provided between the measurement target and each of the plurality of optical imaging systems, and configured to split the reflected line beam and guide the split reflected line beam to the imaging device, whereinthe optical imaging systems have different optical settings for the object in the measurement target from each other;
a plurality of segments are set on the receiving surface of the imaging device while each of the segments is partitioned into a plurality of regions, and at least one region in each of the segments is set as a reception region; and
the optical imaging system causes the reflected line beams split by the beam splitting mechanism to form images on the reception regions in the different segments, respectively, on the receiving surface of the imaging device.
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Accused Products
Abstract
A measuring apparatus for measuring a surface shape of a target, includes a projection system to radiate a line beam on the target, an imaging device to acquire a reflected line beam reflected from the target, a plurality of imaging systems each configured to cause the reflected line beam to form an image on a receiving surface of the imaging device so that a shape of the line beam on the target is acquired and a splitting mechanism to split the reflected line beam and guide the split reflected line beam to the imaging device. The imaging systems have different optical settings for the object in the target, a plurality of segments are set on the receiving surface while each of the segments in each of which at least one region is set as a reception region is partitioned into a plurality of regions, and the imaging system causes the reflected line beams split by the splitting mechanism to form images on the reception regions in the different segments, respectively.
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Citations
15 Claims
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1. A measuring apparatus comprising:
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a projection optical system configured to radiate a line beam on a measurement target; and an imaging device configured to acquire a reflected line beam reflected from the measurement target, the measuring apparatus measuring a surface shape of the measurement target on the basis of a geometric positional relationship in the reflected line beam on the measurement target, the reflected line beam being acquired by the imaging device;
the measuring apparatus further comprisinga plurality of optical imaging systems each provided between the measurement target and the imaging device, and each configured to cause the reflected line beam to form an image on a receiving surface of the imaging device so that a shape of the line beam on the measurement target is acquired; and a beam splitting mechanism provided between the measurement target and each of the plurality of optical imaging systems, and configured to split the reflected line beam and guide the split reflected line beam to the imaging device, wherein the optical imaging systems have different optical settings for the object in the measurement target from each other; a plurality of segments are set on the receiving surface of the imaging device while each of the segments is partitioned into a plurality of regions, and at least one region in each of the segments is set as a reception region; and the optical imaging system causes the reflected line beams split by the beam splitting mechanism to form images on the reception regions in the different segments, respectively, on the receiving surface of the imaging device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A measuring apparatus comprising:
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a projection optical system configured to radiate a line beam on a measurement target; and a reception optical system including an imaging device configured to acquire a reflected line beam reflected from the measurement target, the measuring apparatus measuring a surface shape of the measurement target on the basis of a geometric positional relationship in the reflected line beam on the measurement target, the reflected line beam being acquired by the imaging device, wherein the imaging device has a receiving surface in which a plurality of segments are set; and the reception optical system splits the reflected line beam and causes the split reflected line beams to form images on the different segments in the receiving surface of the imaging device so as to acquire a shape of the line beam on the measurement target.
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Specification