METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION
First Claim
1. A method of driving an electromechanical system comprising a first electrode, a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising:
- applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a first position that is closer to the first electrode than the second electrode; and
applying a second voltage potential difference between the second electrode and the movable electrode so as to drive the movable electrode to a second position that is between the second electrode and the first position.
3 Assignments
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Accused Products
Abstract
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.
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Citations
34 Claims
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1. A method of driving an electromechanical system comprising a first electrode, a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising:
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applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a first position that is closer to the first electrode than the second electrode; and applying a second voltage potential difference between the second electrode and the movable electrode so as to drive the movable electrode to a second position that is between the second electrode and the first position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electromechanical system comprising:
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a first electrode; a second electrode; and a movable electrode disposed between the first electrode and the second electrode, the movable electrode being configured to move between at least a first position that is disposed closer to the first electrode than the second electrode and a second position that is disposed between the first position and the second electrode, wherein applying a first voltage potential difference between the first electrode and the movable electrode drives the movable electrode toward the first position and wherein applying a second voltage potential difference between the second electrode and the movable electrode drives the movable electrode toward the second position. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of fabricating an electromechanical 14, the method comprising:
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forming a first electrode; forming a second electrode disposed at a distance from the first electrode; and forming a movable electrode disposed between the first electrode and the second electrode, the movable electrode being movable between at least a first position that is disposed closer to the first electrode than the second electrode and a second position that is disposed between the first position and the second electrode, wherein the first electrode, second electrode, and movable electrode are formed such that applying a first voltage potential difference between the first electrode and the movable electrode drives the movable electrode toward the first position and such that applying a second voltage potential difference between the second electrode and the movable electrode drives the movable electrode toward the second position. - View Dependent Claims (32, 33, 34)
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Specification