METHOD OF FABRICATING AN ULTRA-SMALL CONDENSER MICROPHONE
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Abstract
In the present invention, a semiconductor substrate wherein a plurality of MEMS microphones is formed is disposed opposed to a discharge electrode in a state of being stuck on a sheet. Electretization of a dielectric film provided in the MEMS microphone is performed by irradiating the dielectric film between a fixed electrode and a vibration film provided in the MEMS microphone with ions resulting from a corona discharge of the discharge electrode in a state that a predetermined potential difference is applied to the fixed electrode and the vibration film and fixing charges based on the ions to the dielectric film. The electretization is successively performed to each MEMS microphone on the semiconductor substrate by relatively moving the semiconductor substrate and the discharge electrode. Therefore, electretization of the dielectric film in the MEMS microphone chip is realized using a low-cost and simple fabricating equipment and productivity can be enhanced.
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Citations
77 Claims
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1-47. -47. (canceled)
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48. A method of fabricating a condenser microphone, comprising the steps of:
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forming a plurality of condenser microphones, each of the condenser microphones including a semiconductor substrate, a fixed electrode arranged opposite a vibration electrode via a space and a dielectric film arranged between the fixed and vibration electrodes, the fixed electrode and the vibration electrode being disposed on the semiconductor substrate; sticking a sheet on a first surface of the semiconductor substrate, the first surface being opposite to a second surface on which the vibration electrode is formed; disposing the condenser microphone facing a discharge electrode; and performing electretization for fixing charges in the dielectric film by irradiating the dielectric film arranged between the fixed electrode and the vibration electrode provided in a condenser microphone on the semiconductor substrate with ions generated from the discharge electrode in a state that a predetermined potential difference is given between the fixed electrode and the vibration electrode, and wherein the electretization for the dielectric film provided in the plurality of the condenser microphones on the semiconductor substrate is successively performed by relatively moving the semiconductor substrate and the discharge electrode. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77)
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Specification