MICROMECHANICAL COMPONENT

• US 20110048131A1
• Filed: 08/31/2010
• Published: 03/03/2011
• Est. Priority Date: 09/02/2009
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Reinmuth, Jochen
• Granted Patent: US 8,671,757 B2
• Time in Patent Office: Days
• US Class Current: 73/504.12
• CPC Class Codes: B81B 2201/025 Inertial sensors not provided for in B81B2201/0235 - B81B2201/0242
• CPC Class Codes: B81B 3/0051 For defining the movement, i.e. structures that guide or limit the movement of an element mechanical arrangements for preventing or damping vibration or shock H01H3/60
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A micromechanical component which has a substrate, a seismic mass, which is deflectably situated on the substrate, and a stop structure for limiting a deflection of the seismic mass in a direction away from the substrate. The stop structure is situated on the substrate and has a limiting section for limiting the deflection of the seismic mass, which is in a plane with the seismic mass. Furthermore, a method for manufacturing a micromechanical component is described.

Claims

1. A micromechanical component, comprising:

a substrate;

a seismic mass which is deflectably situated on the substrate; and

a stop structure to limit a deflection of the seismic mass in a direction away from the substrate, wherein the stop structure is situated on the substrate and has a limiting section in a plane with the seismic mass to limit the deflection of the seismic mass.

2. The micromechanical component as recited in claim 1, further comprising:

a counter-structure situated on the seismic mass, and which comes into contact with the limiting section of the stop structure in an event of the deflection of the seismic mass in a direction away from the substrate.

3. The micromechanical component as recited in claim 2, wherein the seismic mass has a connection element which is connected to the counter-structure on a bottom side at an edge area, and the counter-structure protrudes laterally beyond the edge area of the seismic mass.

4. The micromechanical component as recited in claim 2, wherein the seismic mass has a first and a second rib which run perpendicularly to the substrate, at an edge area, the counter-structure is situated on bottom sides of the first and second ribs, and the limiting section of the stop structure has a third rib which runs perpendicularly to the substrate and which protrudes into an area between the first and second ribs of the seismic mass.

5. The micromechanical component as recited in claim 2, wherein the seismic mass has a through opening adjoining an edge area and protruding ridges on a bottom side in an area of the opening, on which the counter-structure is situated, and the limiting section of the stop structure protrudes into an area enclosed by the opening.

6. The micromechanical component as recited in claim 5, wherein at least one of the limiting section of the stop structure and the seismic mass have protruding structural elements in the area of the opening for limiting a lateral deflection of the seismic mass.

7. The micromechanical component as recited in claim 2, wherein the counter-structure, which is situated on the seismic mass, has at least one of a plate-shaped structure and an elastic structure.

8. The micromechanical component as recited in claim 1, wherein one of a section of the seismic mass or a section of the stop structure is implemented in the form of an elastic structure.

9. The micromechanical component as recited in claim 1, wherein the stop structure is situated on a conductive layer of the substrate.

10. The micromechanical component as recited in claim 1, wherein the stop structure has a support element, which is connected to the limiting section.

11. The micromechanical component as recited in claim 1, further comprising:

a layer situated on the substrate in an area below the limiting section of the stop structure, the layer for limiting a deflection of the seismic mass in a direction toward the substrate.

12. The micromechanical component as recited in claim 1, wherein the seismic mass is implemented in a form of a rocker structure, which is deflectably situated on the substrate via a carrier structure having a torsion spring.

13. A method for manufacturing a micromechanical component, comprising:

providing a substrate;

implementing a seismic mass which is deflectably situated on the substrate; and

implementing a stop structure having a limiting section for limiting a deflection of the seismic mass in a direction away from the substrate, wherein the seismic mass and the stop structure are implemented from a shared functional layer on the substrate.

14. The method as recited in claim 13, further comprising:

implementing a counter-structure which is situated on the seismic mass, and which comes into contact with the limiting section of the stop structure in an event of a deflection of the seismic mass in a direction away from the substrate.

15. The method as recited in claim 14, further comprising:

performing a sacrificial layer method by implementing and removing a sacrificial layer in order to set a distance, which is provided in an initial position of the seismic mass, between the limiting section of the stop structure and the counter-structure.