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MICROMECHANICAL COMPONENT

  • US 20110048131A1
  • Filed: 08/31/2010
  • Published: 03/03/2011
  • Est. Priority Date: 09/02/2009
  • Status: Active Grant
First Claim
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1. A micromechanical component, comprising:

  • a substrate;

    a seismic mass which is deflectably situated on the substrate; and

    a stop structure to limit a deflection of the seismic mass in a direction away from the substrate, wherein the stop structure is situated on the substrate and has a limiting section in a plane with the seismic mass to limit the deflection of the seismic mass.

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