LOADED FILM CASSETTE FOR GASEOUS VAPOR DEPOSITION

• US 20110048991A1
• Filed: 08/31/2009
• Published: 03/03/2011
• Est. Priority Date: 08/31/2009
• Status: Active Grant

• Current Assignee: E. I. du Pont de Nemours and Company (Corteva, Inc.)
• Original Assignee: E. I. du Pont de Nemours and Company (Corteva, Inc.)
• Inventors: CARCIA, PETER FRANCIS, Shilkitus, Kirstin H., Kinard, Richard Dale, Estrada, Calixto, McLean, Robert Scott
• Granted Patent: US 8,524,003 B2
• Time in Patent Office: Days
• US Class Current: 206/387.1
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: B65H 18/00 Winding webs
• CPC Class Codes: B65H 2301/51145 by vapour deposition
• CPC Class Codes: C23C 16/45506 Turbulent flow
• CPC Class Codes: C23C 16/45544 characterized by the apparatus
• CPC Class Codes: C23C 16/45582 Expansion of gas before it reaches the substrate
• CPC Class Codes: C23C 16/45591 Fixed means, e.g. wings, baffles
• CPC Class Codes: C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber

Abstract

A cassette for supporting a film during a gaseous vapor deposition has first and second end plates. A rib on each end plate forms a spiral groove that edgewise receives a spiral wrapping of a film having a width greater than 300 mm. Spaces between turns of the film wrapping define a gas flow channel and spaces between adjacent turns of the rib define a plurality of inlet openings in one end plate that communicate with the channel. Each rib has a predetermined width dimension, a predetermined average thickness dimension, and a width-to-thickness aspect ratio of at least 2:1. The spacing between end plates is at least three hundred millimeters (300 mm) and is also greater than the width dimension of a film substrate at a gaseous deposition temperature. The width dimension of each rib is between about 0.5% to about 2.0% of the end plate spacing.

Claims

1. A film cassette for a gaseous vapor deposition process, the cassette comprising:

a central shaft having an axis therethrough;

a first and a second end plate, each end plate being mounted to the shaft, each end plate comprising a central hub from which radiate a plurality of angularly spaced spokes,

the spokes of each end plate having an interior surface that lies on a reference plane oriented substantially perpendicular to the axis of the shaft,

each end plate having a spiral rib mounted to the interior surface thereof,

each spiral rib having a predetermined number of uniformly spaced turns and a predetermined pitch associated therewith,

the spaces between adjacent turns of the spiral rib defining a spiral groove on each end plate,

a film substrate having first and second edges thereon and having a predetermined width dimension greater than three hundred millimeters (300 mm),

each edge of the film substrate being received within the spiral groove on one of the end plates to define a spiral wrapping of film having a plurality of turns,

spaces between adjacent turns of the spiral film wrapping cooperating to define a gas flow channel extending axially across the cassette between the end plates,

each rib having a cross sectional configuration in a radial plane containing the axis of the shaft, the cross sectional configuration exhibiting substantially linear major edges,

each rib having a predetermined width dimension measured from the interior surface of the spoke on which the rib is mounted in a direction parallel to the axis of the shaft, a predetermined average thickness dimension measured in a radial direction with respect to the axis of the shaft, and a width-to-average-thickness aspect ratio of at least 2;

1, wherein

the interior surface of the spokes is spaced a distance greater than the width dimension exhibited by the film substrate at a gaseous deposition temperature, and

the width dimension of the rib on each end plate is between about 0.5% to about 2.0% of the spacing between the interior surface of the spokes; and

the spaces between adjacent turns of the spirally mounted rib disposed between adjacent spokes on one end plate define a plurality of inlet openings for a gaseous fluid,

the spaces between adjacent turns of the spirally mounted rib extending between adjacent spokes on the other end plate defining a plurality of outlet openings for a gaseous fluid,

the inlet and the outlet openings communicating with the gas flow channel.

2. The cassette of claim 1 wherein the spiral rib has a predetermined pitch,

the pitch of each spiral rib is less than about 1.2% of the interspoke spacing.

3. The cassette of claim 2 wherein

the pitch of each spiral rib is less than about 0.5% of the interspoke spacing.

4. The cassette of claim 2 wherein

the thickness dimension of the rib on each end plate is less than about fifty percent of the pitch.

5. The cassette of claim 1 wherein each spiral rib has a coating of a predetermined thickness thereon, the coating thickness lying in the range from about 100 to about 2000 angstroms,

the coating having a predetermined surface roughness less than about fifty microns (50 microns) and a hardness greater than Shore D 30.

6. The cassette of claim 5 wherein the coating is alumina and wherein the coating thickness lying in the range from about 100 to about 1000 angstroms.

7. The cassette of claim 1 wherein

the one end plate has a predetermined area defined thereon, and wherein

the area of the inlet openings is at least fifty percent of the predetermined area of the one end plate.

8. The cassette of claim 1 wherein the film wrapping has an inner end, and wherein

the shaft is a hollow member having an axially extending slot provided therein, the slot extending parallel to the axis of the shaft, and wherein

the inner end of the film wrapping is received in the slot in the shaft.

9. The cassette of claim 1 wherein each end plate is fabricated of a polymeric material sufficient to withstand a gaseous vapor deposition process using water vapor and trimethylaluminum (TMA) having a minimum processing temperature of at least 80 degrees Centigrade.

10. The cassette of claim 1 wherein the interspoke spacing between the end plates does not vary by more than one to three millimeters (1-3 mm).

11. The cassette of claim 1 wherein each end plate has an outer rim, the hub and rim being connected to each other by the angularly spaced spokes.

12. The cassette of claim 1 wherein the cross sectional configuration of each rib is substantially rectangular.

13. The cassette of claim 12 wherein each rib has an outer end, and wherein

each rib has a flow spoiler at the outer end thereof.

14. The cassette of claim 1 wherein the cross sectional configuration of each rib is substantially wedge-shaped.