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SUBSTRATE HOLDER, SUBSTRATE SUPPORTING APPARATUS, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD USING THE SAME

  • US 20110049100A1
  • Filed: 01/15/2009
  • Published: 03/03/2011
  • Est. Priority Date: 01/16/2008
  • Status: Abandoned Application
First Claim
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1. A substrate holder comprising:

  • a ring-shaped stage configured to receive an edge portion of a substrate thereon;

    a sidewall connected to a lower surface of the stage for supporting the lower surface of the stage; and

    an exhaust hole formed in the sidewall.

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