SPLIT GATE NONVOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING SPLIT GATE NONVOLATILE SEMICONDUCTOR STORAGE DEVICE
First Claim
Patent Images
1. A split gate nonvolatile semiconductor storage device comprising:
- a substrate;
a floating gate configured to be formed on said substrate through a gate insulating film;
a control gate configured to be formed adjacent to said floating gate through a tunnel insulating film;
a first source/drain diffusion layer configured to be formed in a surface region of said substrate on a side of said floating gate;
a second source/drain diffusion layer configured to be formed in a surface region of said substrate on a side of said control gate; and
a silicide configured to contact said first source/drain diffusion layer.
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Abstract
A split gate nonvolatile semiconductor storage device includes: a substrate; a floating gate; a control gate; a first source/drain diffusion layer; a second source/drain diffusion layer; and a silicide. The floating gate is formed on the substrate through a gate insulating film. The control gate is formed adjacent to the floating gate through a tunnel insulating film. The first source/drain diffusion layer is formed in a surface region of the substrate on a side of the floating gate. The second source/drain diffusion layer is formed in a surface region of the substrate on a side of the control gate. The silicide contacts the first source/drain diffusion layer.
16 Citations
13 Claims
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1. A split gate nonvolatile semiconductor storage device comprising:
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a substrate; a floating gate configured to be formed on said substrate through a gate insulating film; a control gate configured to be formed adjacent to said floating gate through a tunnel insulating film; a first source/drain diffusion layer configured to be formed in a surface region of said substrate on a side of said floating gate; a second source/drain diffusion layer configured to be formed in a surface region of said substrate on a side of said control gate; and a silicide configured to contact said first source/drain diffusion layer. - View Dependent Claims (2, 3, 4)
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5. A split gate nonvolatile semiconductor storage device, comprising:
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a first split gate nonvolatile memory cell; and a second split gate nonvolatile memory cell, wherein a source/drain diffusion layer is shared by said first split gate nonvolatile memory cell and said second split gate nonvolatile memory cell, and wherein said first split gate nonvolatile memory cell and said second split gate nonvolatile memory cell are symmetrical with respect to said source/drain diffusion layer, and wherein said source/drain diffusion layer directly contact a silicide.
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6. A method of manufacturing a split gate nonvolatile semiconductor storage device, comprising:
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forming a semiconductor structure, said semiconductor structure including; a gate insulator formation film formed on a substrate, a floating gate polysilicon film formed on said gate insulator formation film, and having a concave portion with a first slant portion at one end and a second slant portion at the other end, a spacer formation insulating film formed on said floating gate polysilicon film, and having an opening portion with a first side surface extending upward from an end of said first slant portion and a second side surface extending upward from an end of said second slant portion, said opening port ion corresponding to said concave portion, a first spacer insulating film covering said first slant portion and said first side surface, and a second spacer insulating film covering said second slant portion and said second said surface; removing said spacer formation insulating film without removing said first spacer insulating film and said second spacer insulating film to expose partially a surface of said floating gate polysilicon film; removing selectively said floating gate polysilicon film and said gate insulator formation film using said first spacer insulating film and said second spacer insulating film as masks to form a floating gate with an acute portion and a gate insulating film while exposing partially said substrate; forming a tunnel insulating film covering an exposed surface of said substrate, a side wall of said gate insulating film, and a side wall of said floating gate; removing said tunnel insulating film between said first spacer insulating film and said second spacer insulating film to expose a surface of said substrate; and forming a silicide between said first spacer insulating film and said second spacer insulating film. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A method of manufacturing a split gate nonvolatile semiconductor storage device, comprising:
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forming a first split gate nonvolatile memory cell and a second split gate nonvolatile memory cell, wherein a source/drain diffusion layer is shared by said first split gate nonvolatile memory cell and said second split gate nonvolatile memory cell, and wherein said first split gate nonvolatile memory cell and said second split gate nonvolatile memory cell are symmetrical with respect to said source/drain diffusion layer; and forming a silicide so as to contact said source/drain diffusion layer.
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Specification