×

THIN FILM TRANSISTOR MANUFACTURING METHOD, THIN FILM TRANSISTOR, THIN FILM TRANSISTOR SUBSTRATE AND IMAGE DISPLAY APPARATUS, IMAGE DISPLAY APPARATUS AND SEMICONDUCTOR DEVICE

  • US 20110050733A1
  • Filed: 02/06/2008
  • Published: 03/03/2011
  • Est. Priority Date: 02/09/2007
  • Status: Active Grant
First Claim
Patent Images

1. A method for producing a thin film transistor comprising the steps of:

  • a film-forming step in which an amorphous oxide film is formed;

    a patterning step in which said amorphous oxide film is patterned by etching; and

    a crystallization step in which said amorphous oxide film which is patterned in the patterning step is crystallized, wherein said crystallized crystalline oxide film is allowed to be a channel layer.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×