Device for Positioning a Moveable Object of Submicron Scale

• US 20110055981A1
• Filed: 03/25/2009
• Published: 03/03/2011
• Est. Priority Date: 03/28/2008
• Status: Abandoned Application

• Current Assignee: Institut Polytechnique De Grenoble, Universite Joseph Fourier
• Original Assignee: Institut Polytechnique De Grenoble, Universite Joseph Fourier
• Inventors: Voda, Alina, Besancon, Gildas, Blanvillain, Sylvain
• Application Number:
  US12/935,063
• Publication Number:
  US 20110055981A1
• Time in Patent Office: Days
• US Class Current: 850/1
• CPC Class Codes: G01P 15/0894 by non-contact electron transfer, i.e. electron tunneling
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 60/16 Probes, their manufacture, or their related instrumentation, e.g. holders

Abstract

The instant disclosure describes a device for positioning a moveable object which can be moved over a distance of the order of 1 nanometer in a time of 1 microsecond or less, comprising: a microtip; first piezoelectric positioning, polarization, detection and control means for moving the microtip relative to the object and bringing it to a distance of the order of 1 nanometer from the object in order to make a tunnel current flow between the microtip and the object, for measuring the tunnel current and for slaving, depending on the measured tunnel current, the distance between the microtip and the object to a constant value (d_ref); and second positioning and control means which are capacitively coupled to the object so as to oppose an attractive force between the object and the microtip depending on the measured tunnel current, the second means being tied to a reference plane.

Claims

1. A device for positioning a moveable object capable of moving over a distance on the order of one nanometer within a time shorter than or equal to one microsecond, comprising:

a microtip;

first piezoelectric positioning, biasing, detection, and servo-control means for displacing the microtip with respect to the object and bringing it to a distance from the object on the order of one nanometer, for having a tunnel current flow between the microtip and the object, for measuring the tunnel current, and for controlling, according to said measured tunnel current, the distance between the microtip and the object; and

second positioning and servo-control means capacitively coupled to counter an attractive force between the object and the microtip according to said measured tunnel current, the second means being linked to a reference plane.

2. The device of claim 1, wherein the distance between the microtip and the object is controlled to a constant value.

3. The device of claim 1, wherein the first piezoelectric positioning means comprise not only means for a positioning in the direction from the tip to the object, but also means for a positioning in a plane orthogonal to this direction.

4. The device of claim 1, wherein the object, together with the reference plane, is assembled on an x-y stage mobile with respect to the microtip.

5. The device of claim 1, wherein the object corresponds to an end area of a microcantilever.

6. The device of claim 1 further comprising third means for setting the distance between the first means and the reference plane and thus the distance between the object and the reference plane.